{"product_id":"e10300-semi-e103-mechanical-specification-for-a-300-mm-single-wafer-box-system-that-emulates-a-foup","title":"E10300 - SEMI E103 - Mechanical Specification for a 300 mm Single-wafer Box System that Emulates a FOUP","description":"\u003cp\u003eThis standard was technically approved by the global Physical Interfaces \u0026amp; Carriers Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published June 2000; previously published July 2004. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eNOTICE: This document was balloted and approved for withdrawal in 2010. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eThis standard specifies the carrier side of the mechanical interface between load ports (or buffers) with FIMS interfaces on process or metrology equipment and a system that includes a box that holds only one wafer (such as a test wafer) and that fits onto an adapter mechanism called a single-wafer interface (SWIF). This system appears to the equipment to be a 300 mm FOUP (except that only the volume around the middle wafer may be accessible). \u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003cbr\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003eSEMI E19 — Standard Mechanical Interface (SMIF)\u003cbr\u003eSEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E103-0704 (Withdrawn 1110) - Withdrawn","offer_id":40234339434563,"sku":"8076","price":171.95,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_8d22b23c-16e1-463c-8660-9264ddfe9049.png?v=1776702160","url":"https:\/\/store-dev2.semi.org\/en-nl\/products\/e10300-semi-e103-mechanical-specification-for-a-300-mm-single-wafer-box-system-that-emulates-a-foup","provider":"SEMI Dev 2","version":"1.0","type":"link"}