{"product_id":"c00356-semi-c3-56-specification-for-diborane-mixtures","title":"C00356 - SEMI C3.56 - Specification for Diborane Mixtures","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published June 2000; previously published March 2012.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTo define the specification and analytical methods and validate the specifications for diborane mixtures.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eDiborane is not used as a pure gas but as a mixture with balance gases of N\u003csub\u003e2\u003c\/sub\u003e, H\u003csub\u003e2\u003c\/sub\u003e, Ar, He, or SiH\u003csub\u003e4\u003c\/sub\u003e.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe quality of the mixture is affected by a number of factors which include:\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• the purity of the gases used for mixture preparation;\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• component filling precision;\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• the cylinder preparation process and \u003ci\u003ein-situ \u003c\/i\u003ereactions of diborane with the internal surface of the cylinder.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eFurthermore, the elapsed time after filling is important due to the chemical instability, and hence decomposition, of the diborane (see Appendix 1).\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eAll component gases shall adhere to the appropriate SEMI Specification, if available.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe quality of the final mixture can be checked after manufacturing by analyzing each cylinder for the concentration of diborane and for key impurities (tracers), namely H\u003csub\u003e2\u003c\/sub\u003e, N\u003csub\u003e2\u003c\/sub\u003e, O\u003csub\u003e2\u003c\/sub\u003e.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.56-0312 (Reapproved 0618) - Inactive","offer_id":43106910371907,"sku":"2136","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI C3.56-0312 - Superseded","offer_id":40234234740803,"sku":"11826","price":171.95,"currency_code":"EUR","in_stock":true},{"title":"SEMI C3.56-0600 - Superseded","offer_id":40234234904643,"sku":"11828","price":171.95,"currency_code":"EUR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_c50058c2-ac37-49b0-b7a9-650a8e3da2a0.png?v=1776703109","url":"https:\/\/store-dev2.semi.org\/en-nl\/products\/c00356-semi-c3-56-specification-for-diborane-mixtures","provider":"SEMI Dev 2","version":"1.0","type":"link"}