{"title":"Popular Standards","description":"","products":[{"product_id":"c09600-semi-c96-test-method-for-determining-density-of-chemical-mechanical-polish-cmp-slurries","title":"C09600 - SEMI C96 - Test Method for Determining Density of Chemical Mechanical Planarization (CMP) Slurries","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe purpose of this Test Method is to provide a\nstandardized test method for measuring the density of slurries, defining the\nsample temperature for the density measurement and specifying the number of\nsignificant figures to which the resulting measurement should be measured by\nthe user and reported in the corresponding Certificate of Analysis (CoA) from\nthe supplier.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method describes the conditions and procedures\nfor measuring the density of single or multi-component slurries with offline\n(benchtop) metrology instrumentation.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method provides a common basis for communication\nbetween slurry manufacturers and users.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C96-1121 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C96-0618 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C96-1121 - Current","offer_id":40234227564611,"sku":"14767","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C96-0618 - Superseded","offer_id":40234227597379,"sku":"2201","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_0ee06a0a-4129-484a-b6f2-09c3c4a8bd75.png?v=1776703053"},{"product_id":"3d01200-semi-3d12-guide-for-measuring-flatness-and-shape-of-low-stiffness-wafers","title":"3D01200 - SEMI 3D12 - Guide for Measuring Flatness and Shape of Low Stiffness Wafers","description":"\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The control of parameters, such as thickness, total thickness variation (TTV), bow, warp, and flatness, is well known to be essential to many, if not all, semiconductor processes as reflected in a number of existing standards.\u003cbr\u003e1.2  The general trend in wafer geometry is to a larger diameter but even so the thickness increases correspondingly, it may not be enough to sustain adequate stiffness of the wafer. With growing aspect ratio of a wafer (e.g., diameter\/thickness), gravity compensation errors increase until they become larger than the actual wafer surface variations. This is already the case for many special purpose wafers with lower modulus of elasticity and is becoming more common in mainstream applications. For example, many wafer substrates are very thin such as Germanium wafers used in specialized solar applications, and many other substrates are being made thinner such as lithium tantalate, and lithium niobate used in communication filters.\u003cbr\u003e1.3  Manufacturing processes incorporating bonded wafers typically require thinned wafers, which will subsequently have much lower stiffness. In addition, since non-planarity of the wafers can lead to problems in subsequent processing steps, including lithography and electrical contact between metal layers on the bonded wafers, these technologies demand higher precision wafers and more accurate depiction of the true topography of the wafer.\u003cbr\u003e1.4  This Guide is designed to provide definitions for describing a more suitable measurement strategy for low stiffness wafers and geometries.\u003cbr\u003e1.5  The more suitable measurement process consists of an alternative mounting for wafers with high aspect ratios and the use of high resolution measurements.\u003cbr\u003e1.6  This Guide also provides a measurement procedure for local bow, which denotes small areas of imperfection of the otherwise flat wafer or substrate.\u003cbr\u003e1.7  The alternative measurement process in this Guide is suitable for use in materials acceptance and process control, but may also be useful in other applications, such as wafer design and production.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide is intended in general for metrology on low stiffness substrates like wafers or other geometrical shapes such as panels. As low stiffness can occur with any material, this Guide can be applied to all materials that show low stiffness in certain deformation modes.\u003cbr\u003e2.2  This Guide applies in particular to glass and silicon wafers with a diameter equal to or exceeding 300 mm and their thickness equal to or less than 775 µm ± 20 µm.\u003cbr\u003e2.3  This Guide also applies to wafers or other geometrical shapes of any material type that show deflections more than 200% of the allowable bow tolerance when tested for bow using the conventional three-point mounting method.\u003cbr\u003e2.4  Although the accuracy of TTV measurement is not as dependent on deflection as bow and warp are, it makes sense to use the same wafer support configuration when measuring TTV.\u003cbr\u003e2.5  This Standard is a guide for a nondestructive procedure that uses a semicontinuous flat mounting surface and high resolution measurement methods.\u003cbr\u003eNOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e\u003cbr\u003eReferenced SEMI Standards (purchase separately)\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI MF534 — Test Method for Bow of Silicon Wafers\u003cbr\u003eSEMI MF657 — Test Method for Measuring Warp and Total Thickness Variation on Silicon Slices and Wafers by a Noncontact Scanning Method\u003cbr\u003eSEMI MF1390 — Test Method for Measuring Bow and Warp on Silicon Wafers by Automated Noncontact Scanning\u003cbr\u003eSEMI MF1530 — Test Method for Measuring Flatness, Thickness, and Thickness Variation on Silicon Wafers by Automated Noncontact Scanning\u003cbr\u003eNOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e\u003cbr\u003eRevision History\u003cbr\u003eSEMI 3D12-1020 (Reapproved 0426)\u003cbr\u003eSEMI 3D12-1020 (technical revision)\u003cbr\u003eSEMI 3D12-0315 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI 3D12-1020 (Reapproved 0426) - Current","offer_id":43165664804931,"sku":"19104","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI 3D12-1020 - Superseded","offer_id":43165664837699,"sku":"14256","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI 3D12-0315 - Superseded","offer_id":40234227662915,"sku":"993","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/3DVolume_5f688951-99d1-4306-9edc-7c83f5914c10.png?v=1776703140"},{"product_id":"c06100-semi-c61-specification-for-bar-code-container-identification","title":"C06100 - SEMI C61 - Specification for Bar-Code Container Identification","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eNOTICE: This Document was balloted and approved for\nwithdrawal in 2010.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eTo provide a minimal set of guidelines for precision and\ndata reporting practices for data supporting a Process Chemicals or Gases SEMI Specification.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Guide applies to data collected to support establishment\nof a SEMI Process Chemicals or Gases Specification or verification of\nperformance to such a SEMI Specification.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C1 — Specification for Reagents\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C61-0707 (Withdrawn 0114)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C61-0707 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C61-0707 (Withdrawn 0114) - Withdrawn","offer_id":40234227695683,"sku":"2746","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C61-0707 - Superseded","offer_id":40234227728451,"sku":"11934","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_ada26ba7-6a0a-447c-9608-7c0f4aeeafae.png?v=1776703009"},{"product_id":"c00327-semi-c3-27-specification-for-boron-trifluoride-bf3-in-cylinders-99-0-quality","title":"C00327 - SEMI C3.27 - Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in January 2018; originally published in 1984; previously published October 2011.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a specification for boron trifluoride (BF\u003csub\u003e3\u003c\/sub\u003e) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document covers requirements for boron trifluoride (BF\u003csub\u003e3\u003c\/sub\u003e) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eIf analytical methods are not complete, the requirements are presented as a guideline.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e SEMI C3 — Specification for Gases\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.27-1102 (Reapproved 0118) - Current","offer_id":40234227793987,"sku":"2126","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C3.27-1102 (Reapproved 1011) - Superseded","offer_id":40234227859523,"sku":"11785","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C3.27-1102 - Superseded","offer_id":40234227925059,"sku":"11784","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_e0346167-3a0b-4eb2-bf22-8e6becf351e4.png?v=1776703117"},{"product_id":"d04500-semi-d45-measurement-methods-for-resistance-of-resin-black-matrix-with-high-resistance-for-fpd-color-filter","title":"D04500 - SEMI D45 - Test Method for Resistance of Resin Black Matrix with High Resistance for FPD Color Filter","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Standard establishes practices for measuring characteristics of resin black matrix (BM) with high resistance for FPD color filter. These methods are applicable to manufacturing, quality control, and development operations.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  These methods shall be used in general to measure the resistance of resin BM with high resistance for FPD color filter.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eNone.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI D45-1019 (Reapproved 0125)\u003cbr\u003eSEMI D45-1019 (technical revision)\u003cbr\u003eSEMI D45-0706 (Reapproved 0412)\u003cbr\u003eSEMI D45-0706 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D45-1019 (Reapproved 0125) - Current","offer_id":43106906603587,"sku":"18204","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D45-1019 - Superseded","offer_id":43106906636355,"sku":"13595","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D45-0706 (Reapproved 0412) - Superseded","offer_id":40234227957827,"sku":"3162","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D45-0706 - Superseded","offer_id":40234228056131,"sku":"12571","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_22a7eb24-a8f3-4040-8806-167a755e53f2.png?v=1776702960"},{"product_id":"c04500-semi-c45-specification-and-guide-for-tetraethylorthosilicate-teos","title":"C04500 - SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS)","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in May 2018; originally published June 1999; previously published June 2009.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C45-0518 - Inactive","offer_id":43106910044227,"sku":"2151","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C45-0309E - Superseded","offer_id":40234228023363,"sku":"11895","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C45-0309 - Superseded","offer_id":40234228088899,"sku":"11892","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C45-0301 - Superseded","offer_id":40234228121667,"sku":"11891","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C45-0699 - Superseded","offer_id":40234228154435,"sku":"11896","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_52907c38-a87a-46cd-846f-417c4c7e704a.png?v=1776703085"},{"product_id":"d05400-semi-d54-fpd生産における基板管理sms-fpdのための仕様","title":"D05400 - SEMI D54 - FPD生産における基板管理(SMS-FPD)のための仕様","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e本スタンダードは，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Flat Panel Display – Factory Automation Committee\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eで技術的に承認されている。現版は\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2009\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e5\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e13\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e日，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Audits and Reviews Subcommittee\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eにて発行が承認された。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2009\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e6\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月に\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003ewww.semi.org\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eで，そして\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2009\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e7\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月に\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eCD-ROM\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eで入手可能となる。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp align=\"justify\"\u003e本文書は\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2009\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e10\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月に編集上の修正がなされた。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e¶¶ 7.3.4.1\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e10.2.3.4\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e10.2.3.5\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e10.2.3.6.\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eに変更が加えられている。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"left\"\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003eFPD\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e生産現場において自動化の対応が進んでいるが，現状は各工場が独自の仕様により製造装置の制御を行っている。このために製造装置の自動化対応のコストや立ち上げ期間という面で大きなロスを招いている。また，基板サイズがより大きなものへと移行することにより基板の枚葉搬送など新たなニーズに対応する必要もある。本書は，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eFPD\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e生産現場において自動材料搬送システム\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e (AMHS) \u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eや製造装置の基板受け渡しに関する自動化のための標準的な挙動を記述するものである。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp align=\"justify\"\u003e本文書は，\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eFPD\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e生産現場に導入される製造装置への基板搬入出を行うためのトランスファポイント（受け渡しポジション）におけるホスト・製造装置間の通信を扱うスタンダードである。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp align=\"justify\"\u003e本文書は，自動および手動での基板搬送についてホストが情報を知り，その役割を果たし易くするスタンダードを定義するものである。また，製造装置における材料処理を制御するために有用になることも意図としている。具体的には，以下の内容を提供する。\u003c\/p\u003e \u003cul\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e製造装置上のトランスファポイント（受け渡しポジション）のオブジェクト定義\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e製造装置上のトランスファポイント（受け渡しポジション）のオブジェクト状態モデル\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e製造装置上のトランスファポイント（受け渡しポジション）のオブジェクトへのサービスコマンド\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e製造装置上のトランスファポイント（受け渡しポジション）の挙動\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp align=\"justify\"\u003e本書は，製造装置における基板搬入出を行うための受け渡しポジションを明確に定義し，基板受け渡しの制御を行う上で有用となるインタフェースに関しての記述を行っているが，工場内に設置された基板搬入出を行うための\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eAMHS\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eにも適用可能である。ただし，それら製造装置以外に適用する場合は，各設備メーカーにて適用性を判断し，実装すべきである。\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfonthelv\u003e\u003cfonthelv\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI D51 — Specification for Handshake Protocol of Single Substrate for Handling off\/on Tool in FPD Production\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E39 — Object Services Standard: Concepts, Behavior, and Services\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E40 — Standard for Processing Management\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E41 — Exception Management (EM) Standard\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E53 — Event Reporting\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E90 — Specification for Substrate Tracking\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/fonthelv\u003e\u003c\/fonthelv\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D54-0709E - Inactive","offer_id":40234227761219,"sku":"3177","price":231.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D54-0709 - Superseded","offer_id":40234227826755,"sku":"12581","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_9bffd964-2e45-409a-8e3f-b3d9a7108c84.png?v=1776702948"},{"product_id":"c01000-semi-c10-mdl定量下限値決定に関するガイド","title":"C01000 - SEMI C10 - MDL（定量下限値）決定に関するガイド","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.\u003c\/font\u003e\u003c\/p\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e免責事項：\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e　このSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本スタンダードは，\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eLiquid Chemicals Global Technical Committee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで技術的に承認されている。現版は2014\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年8\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月25\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e日，global Audits and Reviews Subcommittee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにて発行が承認された。2014\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年11\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月にwww.semiviews.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eおよびwww.semi.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで入手可能となる。初版は1998\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年発行，前版は2009\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年11\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e月に発行された。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e注意：　本文書は，編集上の修正を伴い，再承認された。\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSEMI\u003cfont size=\"2\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eプロセスケミカルまたはガス仕様のデータに基づいて，定量下限値 (MDL: method detection limit) \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eの決定方法について必要最小限のガイドラインを提示する。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこのガイドは，\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eプロセスケミカルまたはガススタンダードおよびガイドに指定された微量不純物に適用される。該当するすべての微量不純物について，校正曲線の回帰分析に基づいて，それぞれの仕様と同等またはそれ以内のMDL\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eを決定すべきである。このガイドはSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e仕様に対する性能の検証およびSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにおける新規仕様の制定の両面への適用を意図している。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C16 — Guide for Precision Reporting\/Data Traceability\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C10-1109 (Reapproved 1114) - Current","offer_id":40234228187203,"sku":"2108","price":457.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C10-1109 - Superseded","offer_id":40234228219971,"sku":"11712","price":457.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_c5b028d3-bdb2-42fe-8d67-bb2604cd3afc.png?v=1776703132"},{"product_id":"c00348-semi-c3-48-standard-for-nitrogen-n2-bulk-liquid-99-9994-quality","title":"C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 1999. Available at www.semi.org in February 2000; originally published in 1993; previously published in 1996.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earth’s atmosphere; colorless liquid. Noncombustible; a cryogenic gas derived from liquid air by fractional distillation.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.48-0200 (Withdrawn 0303) - Replaced","offer_id":40234228285507,"sku":"2725","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_a03d6f04-fc9e-4e85-ac12-b482689ffc02.png?v=1776703020"},{"product_id":"c04200-semi-c42-specification-for-sodium-hydroxide-pellets","title":"C04200 - SEMI C42 - Specification for Sodium Hydroxide Pellets","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at www.semi.org in October 2010; originally published in 1978; previously published November 2005.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to standardize requirements for sodium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document is a grade of sodium hydroxide pellets used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C42-1110 - Inactive","offer_id":40234228482115,"sku":"2314","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C42-1105 - Superseded","offer_id":40234228547651,"sku":"11885","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C42-0699 - Superseded","offer_id":40234228580419,"sku":"11884","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_0e539c0d-a3c4-4f00-a8b7-dbcdf1d0aef8.png?v=1776703048"},{"product_id":"c03200-semi-c32-メチルエチルケトンの仕様","title":"C03200 - SEMI C32 - メチルエチルケトンの仕様","description":"\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e本スタンダードは，\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Liquid Chemicals Committee\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eで技術的に承認されている。現版は\u003cfont size=\"2\" face=\"Arial\"\u003e2011\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003cfont size=\"2\" face=\"Arial\"\u003e5\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月\u003cfont size=\"2\" face=\"Arial\"\u003e13\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e日，\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Audits and Reviews Subcommittee\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eにて発行が承認された。\u003cfont size=\"2\" face=\"Arial\"\u003e2011\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003cfont size=\"2\" face=\"Arial\"\u003e6\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月に\u003cfont size=\"2\" face=\"Arial\"\u003ewww.semiviews.org\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eおよび\u003cfont size=\"2\" face=\"Arial\"\u003e www.semi.org\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eで入手可能となる。初版は\u003cfont size=\"2\" face=\"Arial\"\u003e1978\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年発行。前版は\u003cfont size=\"2\" face=\"Arial\"\u003e2006\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003cfont size=\"2\" face=\"Arial\"\u003e3\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月発行。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont lang=\"JA\" size=\"2\" face=\"MS Mincho,‚l‚r –¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS Mincho,‚l‚r –¾’©\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e注意\u003cfont size=\"2\" face=\"Arial\"\u003e: \u003cfont lang=\"JA\" size=\"2\" face=\"MS Mincho,‚l‚r –¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS Mincho,‚l‚r –¾’©\"\u003e本文書は，編集上の修正を伴い再承認された。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e本文書の目的は，半導体産業で使用されるメチルエチルケトンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。本文書は，メチルエチルケトンに対して要求が認められたグレードのガイドラインも示す。ガイドラインの場合は，試験方法は統計的に有効となっていない場合がある。\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C32-0306 (Reapproved 0611) - Inactive","offer_id":40234228351043,"sku":"2310","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_4d518815-daf7-4040-80cf-aa967d1ed549.png?v=1776703050"},{"product_id":"c04700-semi-c47-guide-for-trans-1-2-dichloroethylene","title":"C04700 - SEMI C47 - Guide for Trans 1,2 Dichloroethylene","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eNOTICE:\u003c\/b\u003e This Standard or Safety Guideline has an Inactive\nStatus because the conditions to maintain Current Status have not been met.\nInactive Standards or Safety Guidelines are available from SEMI and continue to\nbe valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe purpose of this Standard is to provide a guide for a grade\nof trans 1,2 dichloroethylene for which a need has been identified.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe scope of this Standard lists the proposed impurity\nlimits of trans 1,2 dichloroethylene used in the semiconductor industry.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C47-0812 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C47-0706 (complete rewrite)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C47-0699 (first published - replaces SEMI C7.20)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C47-0812 - Inactive","offer_id":40234228383811,"sku":"2320","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C47-0706 - Superseded","offer_id":40234228449347,"sku":"11900","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C47-0699 - Superseded","offer_id":40234228514883,"sku":"11899","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_68456099-be03-4afb-ab66-5aa48eb9741d.png?v=1776703042"},{"product_id":"c04900-semi-c49-トリメチルホウ酸のガイド","title":"C04900 - SEMI C49 - トリメチルホウ酸のガイド","description":"\u003cp class=\"Indent\" style=\"TEXT-JUSTIFY: inter-ideograph; MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e本\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eスタンダード\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eは，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003eglobal Liquid Chemicals Committee\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eで技術的に承認されている。現版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e20\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e10\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e8\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e27\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e日，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eにて発行が承認された。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e20\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e10\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e10\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003ewww.semi.org\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e初版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1995\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e年発行。前版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e2005\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e月発行。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; mso-list: none\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e\u003cfont size=\"2\"\u003e本文書の目的は，半導体産業で使用されるトリメチルホウ酸に対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。本文書はトリメチルホウ酸に対して要求が認められたグレードのガイドも示す。ガイドの場合は，試験方法は統計的に有効となっていない場合がある。\u003cspan style=\"COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C49-1110 - Inactive","offer_id":40234228416579,"sku":"2322","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_c2deb73d-234f-4516-b389-9b544f119211.png?v=1776703039"},{"product_id":"3d00800-semi-3d8-guide-for-describing-silicon-wafers-for-use-as-300-mm-carrier-wafers-in-a-3ds-ic-temporary-bond-debond-tbdb-process","title":"3D00800 - SEMI 3D8 - Guide for Describing Silicon Wafers for Use as 300 mm Carrier Wafers in a 3DS-IC Temporary Bond-Debond (TBDB) Process","description":"\u003cp align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Guide is intended to address the needs of the 3D\nStacked IC (3DS-IC) industry by defining the items\/parameters needed to procure\nvirgin silicon carrier wafers to be used in a 3DS-IC process.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Guide defines the items\/parameters to acquire silicon wafers\nto be used as carrier wafers in a temporary bond\/debond (TBDB) application.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Guide describes silicon wafers with nominal diameter\nof 300 mm although, for 3DS-IC applications, the actual wafer diameter may differ\nslightly due to process requirements\u003ca name=\"_Toc215911941\"\u003e\u003c\/a\u003e\u003ca name=\"_Toc239666318\"\u003e\u003cspan style=\"mso-bookmark:_Toc215911941\"\u003e.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/a\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cspan style=\"mso-bookmark:_Toc215911941\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-bookmark:_Toc239666318\"\u003e\u003c\/span\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI 3D9 — Guide for Describing Materials Properties for a\n300 mm 3DS-IC Wafer Stack\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI 3D10 — Guide to Describing Materials Properties for\nIntermediate Wafers for Use in a 300 mm 3DS-IC Wafer Stack\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003c!--[if gte vml 1]\u003e\u003cv:line id=\"Straight_x0020_Connector_x0020_8\" style=\"position:absolute;z-index:251659264;visibility:visible;\n mso-wrap-style:square;mso-height-percent:0;mso-wrap-distance-left:9pt;\n mso-wrap-distance-top:0;mso-wrap-distance-right:9pt;\n mso-wrap-distance-bottom:0;mso-position-horizontal:absolute;\n mso-position-horizontal-relative:text;mso-position-vertical:absolute;\n 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Additional data is necessary to correlate the results tested in the procedure using high challenge particle concentrations with the actual filter’s performance to evaluate particle behavior under much lower particle concentrations in real world UPW. That is to say, in the method described in this Guide, filters are challenged at high particle concentrations not representative of real-world conditions because current particle-detection metrology cannot detect low particle concentrations.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Guide applies to UPW-system final filters and other UPW distribution filters intended for use in semiconductor manufacturing tools and ancillary equipment.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Guide applies to advanced semiconductor facilities requiring control of the UPW particles from 5 to 15　nm. The guide may also be used for large particles not covered by existing particle-detection metrology.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eFour aspects in evaluating filter performance are considered in this Guide:\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cul dir=\"ltr\"\u003e \u003cli\u003e \u003cdiv align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eAbility of the filter to retain influent particles is assessed with a particle challenge test. The filter is tested under single pass filtration of water or challenge particle solution—with no recirculation applied.\u003c\/font\u003e\u003c\/div\u003e\n\u003c\/li\u003e \u003cli\u003e \u003cdiv align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003ePossible contribution of particles by the filter is evaluated during initial rinse of the filter　\u003c\/font\u003e\u003c\/div\u003e\n\u003c\/li\u003e \u003cli\u003e \u003cdiv align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eFilter performance stability is addressed by repeating the performance test throughout the operating lifetime of the filter. Different representative filters from the same group of filters are tested during filter life time in order to confirm the frequency of the filter change out.\u003c\/font\u003e\u003c\/div\u003e\n\u003c\/li\u003e \u003cli\u003e \u003cdiv align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eInitial filter cleanliness.\u003c\/font\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Guide describes procedures for measuring filter particle retention while using UPW as the test media. UPW parameters, for the intents and purposes of this Guide, is defined in § 7.6.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Guide uses commercially available colloidal silica with a mean particle size of 5 to 15 nm. Using polystyrene latex spheres (PSL) as a filter challenge does not work at the 5 to 15 m size range because the PSL size distribution is too broad and using white spherical plastic beads is an unrealistic challenge for filter testing. Colloidal silica is a superior challenge material because it is commercially available (and inexpensive) in the 5 to 15 nm size range. Colloidal silica has a relatively narrow size distribution and has lower interaction with filter material; therefore it is primarily removed by a filter’s sieving mechanism.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe filter-performance evaluation procedure described in this Guide uses a combination of grab-sample lab analysis and in situ liquid particle measurement (using an aerosol particle detection technique).\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies\u003cbr\u003eSEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems\u003cbr\u003e SEMI F61 — Guide for Ultrapure Water System Used in Semiconductor Processing\u003c\/font\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C79-0819 - Current","offer_id":40234228875331,"sku":"13470","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C79-0113 - Superseded","offer_id":40234228940867,"sku":"2182","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_15fa7654-00ca-4203-a3db-1f0eb8a7bc2a.png?v=1776703065"},{"product_id":"c08300-semi-c83-test-method-for-tensile-strength-applied-to-welded-connections-made-by-pfa-weld-fitting","title":"C08300 - SEMI C83 - Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemical Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in July 2013.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis method provides a uniform procedure to determine the tensile strength applied to welded connections made by PFA weld fitting.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis method can be used to characterize welded connections on the basis of test data developed under the conditions described herein, but the results are not intended to imply a performance rating.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTube defined in this method has a circular cross section and is made of PFA.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eWelded connections tested by this method are made by PFA weld fitting.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe seal between the tube and the welded fitting and between the welded fitting and the welded fitting is within the scope of this Document. All other, threaded seals are beyond the scope of this Document.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eWhen using this method for making comparisons among various welded fitting designs and manufacturers, the user must be specific in the selection of the tube and welded fitting s to be evaluated.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe International System of Units (SI) is used as the standard unit of measure in this Document. The U.S. Customary units are in parentheses for reference purposes only and have been rounded to the nearest whole value.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\u003cp align=\"left\"\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C83-0713 - Inactive","offer_id":40234228973635,"sku":"2186","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_b549a81a-34bf-4e0f-86b3-a438e3d0c8fd.png?v=1776703063"},{"product_id":"c02000-semi-c20-specification-and-guide-for-ammonium-fluoride-40","title":"C02000 - SEMI C20 - Specification and Guide for Ammonium Fluoride 40%","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Standard is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Standard also provides guidelines for grades of ammonium fluoride 40% for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  The scope of this Standard is all grades of ammonium fluoride 40% used in the semiconductor industry.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI C20-0213 (Reapproved 1218)\u003cbr\u003eSEMI C20-0213 (technical revision)\u003cbr\u003eSEMI C20-1101 (technical revision)\u003cbr\u003eSEMI C20-0301 (technical revision)\u003cbr\u003eSEMI C20-0699 (first published - replaces SEMI C1.3, SEMI C7.18, and SEMI C11.2)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C20-0213 (Reapproved 1218) - Inactive","offer_id":43106910863427,"sku":"2115","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C20-0213 - Superseded","offer_id":40234229039171,"sku":"11743","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C20-1101 - Superseded","offer_id":40234229071939,"sku":"11744","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_63fcbe04-4ae9-469e-a6c8-8b5d8389144e.png?v=1776703126"},{"product_id":"c00330-semi-c3-30-standard-for-hydrogen-h2-bulk-99-9997-quality","title":"C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality","description":"\u003cp\u003eNOTICE: This document was replaced by SEMI C58 in 2005. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eThis standard is intended to establish the definitions, general procedures, specifications, and analytical procedures for hydrogen (H2), bulk, 99.9997% quality. Where an analytical procedure different from that provided is substituted by a supplier or user, the burden of proof is on said supplier or user to confirm the equivalency. It should be noted that the following list of criteria was considered when determining the specified analytical method: Reliability; Ease of Use; Maintenance; Precision; Accuracy; Sensitivity; Versatility; and Availability of Equipment. This standard falls under the general specification, SEMI C3, which is intended to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits.\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eNone.\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.30-96 (Reapproved 0999) - Replaced","offer_id":40234229137475,"sku":"2718","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_7a868f2a-ed19-4809-8fb6-27ea22e51bc3.png?v=1776703033"},{"product_id":"c00602-semi-c6-2-パイプラインガスとして授受されるグレード20-0-02酸素に対するパーティクル仕様","title":"C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20\/0.02酸素に対するパーティクル仕様","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.\u003c\/font\u003e\u003c\/p\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e免責事項：\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e　このSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本スタンダードは，\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eGases Global Technical Committee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで技術的に承認されている。現版は2011\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年9\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月12\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e日，global Audits and Reviews Subcommittee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにて発行が承認された。2011\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年11\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月にwww.semiviews.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eおよび www.semi.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで入手可能となる。初版は1993\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年発行。前版は2002\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年11\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月発行。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI　C97.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこの文書の目的は：\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e(1) 20\/0.02\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eグレード酸素バルク供給ガスに対するパーティクルの最大許容濃度を設定し，(2)\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eその確認のための参照方法の記述である。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eこの文書はパイプラインを通して授受される酸素ガスにのみ適用される。シリンダ充填ガスや液体状態の酸素ガスには適用されない。\u003c\/p\u003e\n\u003cfont face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C6.2-93 (Reapproved 1111) - Replaced","offer_id":40234229170243,"sku":"2735","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_37d2e3a3-a3c6-431a-a429-596686fe6502.png?v=1776703030"},{"product_id":"c07100-semi-c71-specification-and-guide-for-boron-trichloride-bci3","title":"C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe purpose of this Document is to provide specification\nand guide for boron trichloride (BCl3) that are used in the semiconductor\nindustry.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Specification relates to a geometry of 0.5 µ or less\n(0.35 to 0.5 range) and describes analytical techniques using gas phase analysis.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eIf analytical methods are not complete, the requirements\nare presented as guides.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C3 — Specification for Gases\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C71-0421 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C71-0815 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C71-0611 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C71-0421 - Current","offer_id":40234229465155,"sku":"14501","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C71-0815 - Superseded","offer_id":40234229596227,"sku":"2174","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C71-0611 - Superseded","offer_id":40234229727299,"sku":"11949","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_8c834a38-ac0e-45db-8ba7-524a426c822c.png?v=1776703071"},{"product_id":"c00349-semi-c3-49-standard-for-bulk-nitrogen-n2-99-99999-quality","title":"C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in March 2003; originally published in 1994.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earth’s atmosphere; colorless liquid. Noncombustible; a cryogenic gas derived from liquid air by fractional distillation.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.49-94 (Withdrawn 0303) - Replaced","offer_id":40234229235779,"sku":"2726","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_6f773a7e-c7d8-4155-9ac9-50cd60aa2489.png?v=1776703020"},{"product_id":"c06500-semi-c65-guide-for-trimethylsilane-3ms-99-995-quality","title":"C06500 - SEMI C65 - Guide for Trimethylsilane (3MS), 99.995% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published February 2008.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for trimethylsilane (3MS) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document covers guides for 3MS used in the semiconductor industry for plasma enhanced chemical vapor deposition (PECVD) as low k dielectric and as a SiC etch stop, hard mask and copper diffusion barrier precursor.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C65-0317 - Inactive","offer_id":43106909749315,"sku":"2167","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C65-0308 - Superseded","offer_id":40234229334083,"sku":"11941","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_e1aba5e9-6ef7-40ee-890c-859656bb7e85.png?v=1776703076"},{"product_id":"c04600-semi-c46-25-テトラメチル水酸化アンモニウムのガイド","title":"C04600 - SEMI C46 - 25%テトラメチル水酸化アンモニウムのガイド","description":"\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e本スタンダードは，\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Liquid Chemicals Technical Committee\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eで技術的に承認されている。現版は\u003cfont size=\"2\" face=\"Arial\"\u003e2012\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003cfont size=\"2\" face=\"Arial\"\u003e6\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月\u003cfont size=\"2\" face=\"Arial\"\u003e18\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e日，\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Audits and Reviews Subcommittee\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eにて発行が承認された。\u003cfont size=\"2\" face=\"Arial\"\u003e2012\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003cfont size=\"2\" face=\"Arial\"\u003e8\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月に\u003cfont size=\"2\" face=\"Arial\"\u003ewww.semiviews.org\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eおよび\u003cfont size=\"2\" face=\"Arial\"\u003e www.semi.org\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eで入手可能となる。初版は\u003cfont size=\"2\" face=\"Arial\"\u003e1991\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年発行。前版は\u003cfont size=\"2\" face=\"Arial\"\u003e2006\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e年\u003cfont size=\"2\" face=\"Arial\"\u003e3\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e月発行。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e本文書の目的は，\u003cfont size=\"2\" face=\"Arial\"\u003e25%\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eテトラメチル水酸化アンモニウムに対して要求が認められたグレードのガイドを示すことである。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e本文書の範囲は半導体産業で使用される\u003cfont size=\"2\" face=\"Arial\"\u003e25%\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho,‚l‚r ‚o–¾’©\"\u003eテトラメチル水酸化アンモニウムの提案された不純物限度の一覧作成である。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cspan lang=\"EN-GB\"\u003e SEMI C1 — Guide for the Analysis of Liquid Chemical.\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C46-0812 - Inactive","offer_id":40234229301315,"sku":"2318","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_7cd1ab58-dc3d-4f01-91db-f81f318c4ba1.png?v=1776703045"},{"product_id":"d01200-semi-d12-specification-for-edge-condition-of-flat-panel-display-fpd-substrates","title":"D01200 - SEMI D12 - Specification for Edge Condition of Flat Panel Display (FPD) Substrates","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003eThis Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www.semi.org in July 2003; originally published in 1995.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Document defines various aspects of the edges of a flat panel display substrate and describes their relationships. It assumes the existence of terminology described in other SEMI Flat Panel Display Documents. It applies to substrates whose nominal thickness specification is 1.1 mm.\u003c\/p\u003e\n\u003ci\u003e \u003c\/i\u003e\u003cp align=\"justify\"\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003eSignificance — The edges of a flat panel display substrate are important in both the specifications for and uses of the material. They effect the means for producing, handling, storing, and processing substrates. Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing\/inspection equipment.\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI D3 — Quality Area Specification for Flat Panel Display Substrates\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D12-95 (Reapproved 0703) - Inactive","offer_id":40234229366851,"sku":"3112","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_6028f3db-041d-44ba-83fd-d5a6e402611f.png?v=1776703003"},{"product_id":"d03200-semi-d32-fpdガラス基板のオリエンテーションコーナ統一にともなう情報管理改善の仕様","title":"D03200 - SEMI D32 - FPDガラス基板のオリエンテーションコーナ統一にともなう情報管理改善の仕様","description":"\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e免責事項：\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e この\u003c\/font\u003e\u003c\/font\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSEMI\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"left\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp align=\"left\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本スタンダードは，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eFlat Panel Display – Factory Automation Global Technical Committee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで技術的に承認されている。現版は\u003c\/font\u003e\u003c\/font\u003e2009\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年\u003c\/font\u003e\u003c\/font\u003e5\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月\u003c\/font\u003e\u003c\/font\u003e13\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e日，\u003c\/font\u003e\u003c\/font\u003eglobal Audits and Reviews Subcommittee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにて発行が承認された。\u003c\/font\u003e\u003c\/font\u003e2009\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年\u003c\/font\u003e\u003c\/font\u003e6\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月に\u003c\/font\u003e\u003c\/font\u003ewww.semi.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで。初版は\u003c\/font\u003e\u003c\/font\u003e2003\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年\u003c\/font\u003e\u003c\/font\u003e3\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月に発行された。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/font\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本仕様は，二次元のコードシンボルとそれに関連する英数字（読取用カメラとディスプレイで読み取り可能なもの）から成り，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eFPD\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e用ガラス基板の有効範囲外に刻印されるマーキングシンボルの位置・寸法・情報量を規定する。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本仕様におけるマーキングシンボルは，従来の\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eOC\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e（オリエンテーションコーナ）により識別していた情報に加え，基板ごとの\u003c\/font\u003e\u003c\/font\u003eID\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e等の情報を加えることができる。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこのため本仕様により，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eFPD\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e用ガラス基板サプライヤは，出荷前にこれらの情報を基板上の\u003c\/font\u003e\u003c\/font\u003eOC\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eの周囲\u003c\/font\u003e\u003c\/font\u003e1\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e箇所にマークすることで，基板情報管理を簡素化できる。さらに，このマーキングシンボルを使用することで，従来使用している\u003c\/font\u003e\u003c\/font\u003eOC\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eカットの形状の膨大な種類を，将来は削減することが可能になる。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本仕様に記述されるマーキングシンボルは，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eFPD\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e用ガラス基板のサプライヤとユーザにより使用されることを目的としている。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本仕様では標準的な\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eOC\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e位置を規定して，将来的には\u003c\/font\u003e\u003c\/font\u003eOC\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eカット形状も同様に統一されることを支持している。これが成し遂げられたとき，仕様の暫定的な部分は削除される。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本仕様では，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eFPD\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e用ガラス基板の有効範囲外に刻印されるマーキングシンボルの内容・寸法・位置（表面上の）を記述している。\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこのマーキングシンボルは，ユーザのパターンプロセスに影響しない方法と位置でマークされる。\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本仕様では，各要求条件を満たすにあたってどのマーキング手法を使用するかは規定していないが，マーキングシンボルは個々のドットをレーザで書き込むものと想定している。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eマーキングシンボルは，新品基板からフルにパターン化済みの基板まで，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eFPD\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eプロセスのすべての工程に適用できる。データマトリクスコードのフォーマットとアルゴリズムは，\u003c\/font\u003e\u003c\/font\u003eISO\/IEC 16022\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eに規定された二次元記号表示に準拠している。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"left\"\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D32-0303 (Reapproved 0709) - Inactive","offer_id":40234229203011,"sku":"3145","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_9f8fa931-06f9-4b51-acc8-939a97aa980f.png?v=1776702976"},{"product_id":"d01600-semi-d16-specification-for-mechanical-interface-between-flat-panel-display-material-handling-system-and-tool-port","title":"D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port","description":"\u003cp\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eThis Specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment.\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI D5 — Standard Size for Flat Panel Display Substrates \u003cbr\u003e \u003c\/font\u003e\u003cfont\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes \u003c\/font\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D16-0998 - Inactive","offer_id":40234229432387,"sku":"3117","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_cb2750f4-6fa7-4dab-8210-4b7ab7ade647.png?v=1776703000"},{"product_id":"c00604-semi-c6-4-particle-specification-for-grade-20-0-02-nitrogen-n2-and-argon-ar-delivered-as-pipeline-gas","title":"C00604 - SEMI C6.4 - Particle Specification for Grade 20\/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in November 2011; originally published in 1990; previously published November 2002.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purposes of this Document are: (1) to set a maximum permissible particle concentration for 20\/0.02 grade nitrogen and argon bulk supply gases, and (2) to describe a reference method for its verification.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document applies only to nitrogen gas and argon gas delivered through pipelines; it is not applicable to cylinder gases or gases in their liquid state.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C6.4-90 (Reapproved 1111) - Replaced","offer_id":40234229399619,"sku":"2738","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C6.4-90 (Reapproved 1102) - Superseded","offer_id":40234229497923,"sku":"11928","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_e1ef322f-2d11-4948-a150-cc332f8a2686.png?v=1776703028"},{"product_id":"c00358-semi-c3-58-specification-for-octafluorocyclobutane-c4f8-electronic-grade-in-cylinders-99-999-quality","title":"C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www.semiviews.org and www.semi.org in April 2018; originally published June 2000; previously published October 2011.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide specification for octafluorocyclobutane (C\u003csub\u003e4\u003c\/sub\u003eF\u003csub\u003e8\u003c\/sub\u003e), that is used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document covers requirements for octafluorocyclobutane (C\u003csub\u003e4\u003c\/sub\u003eF\u003csub\u003e8\u003c\/sub\u003e) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.58-1011 (Reapproved 0418) - Current","offer_id":40234229563459,"sku":"2138","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C3.58-1011 - Superseded","offer_id":40234229694531,"sku":"11836","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C3.58-0303 - Superseded","offer_id":40234229825603,"sku":"11832","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C3.58-0600 - Superseded","offer_id":40234229858371,"sku":"11834","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_544e6927-eb1f-4f88-8c27-8cccd34d32e2.png?v=1776703107"},{"product_id":"d01900-semi-d19-test-method-for-the-determination-of-chemical-resistance-of-flat-panel-display-color-filters","title":"D01900 - SEMI D19 - Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filters","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Standard establishes two methods for evaluating the chemical resistance of FPD color filters. One of these methods is qualitative, the other is quantitative.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  These methods may be used by suppliers and users of color filters for FPD applications, for use in judging quality of production and developing samples.\u003cbr\u003e2.2  These methods test the chemical resistance of color filters by utilizing chemicals and conditions typically employed in FPD manufacturing.\u003cbr\u003e2.3  These methods are destructive.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI D22 — Test Method for the Determination of Color, Transmittance of FPD Color Filter Assemblies\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI D19-1019 (Reapproved 0125)\u003cbr\u003eSEMI D19-1019 (technical revision)\u003cbr\u003eSEMI D19-0305 (Reapproved 0412)\u003cbr\u003eSEMI D19-0305 (technical revision)\u003cbr\u003eSEMI D19-0299E (editorial revision)\u003cbr\u003eSEMI D19-0299 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D19-1019 (Reapproved 0125) - Current","offer_id":43106908241987,"sku":"18203","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D19-1019 - Superseded","offer_id":43106908274755,"sku":"13594","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D19-0305 (Reapproved 0412) - Superseded","offer_id":40234229661763,"sku":"3123","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D19-0305 - Superseded","offer_id":40234229792835,"sku":"12529","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D19-0299E - Superseded","offer_id":40234229891139,"sku":"12528","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_f56cd2b4-eb7e-4a98-97f9-6b9de0abfb70.png?v=1776702996"},{"product_id":"3d003-semi-3d3-guide-for-multiwafer-transport-and-storage-containers-for-300-mm-thin-silicon-wafers-on-tape-frames","title":"3D00300 - SEMI 3D3 - Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Guide provides the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Guide covers the shipping of 300 mm nominally diameter silicon wafers. The actual diameter of a 300 mm (nominal) silicon wafer may be less than 300 mm due to material removal via edge trim; the diameter of 300 mm silicon wafers fabricated specifically for use as carrier wafers may be greater than 300 mm.\u003cbr\u003e- The maximum diameter of a nominal 300 mm wafer is 301 mm.\u003cbr\u003e- There is not a fixed minimum diameter for nominal 300 mm wafers; edge trim and other processes are not yet standardized; thus, the actual diameter of nominal 300 mm wafers may millimeters smaller.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Guide may be useful for materials other than silicon, but that is beyond the scope of this Standard.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI G74 — Specification for Tape Frame for 300 mm Wafers\u003cbr\u003eSEMI G87 — Specification for Plastic Tape Frame for 300 mm Wafer\u003cbr\u003eSEMI G94 — Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer\u003cbr\u003eSEMI M31 — Specification for Mechanical Features for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI 3D3-1123 (technical revision)\u003cbr\u003eSEMI 3D3-0613 (Reapproved 1218)\u003cbr\u003eSEMI 3D3-0613 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI 3D3-1123 - Current","offer_id":43106911879235,"sku":"17230","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI 3D3-0613 (Reapproved 1218) - Superseded","offer_id":43106911912003,"sku":"10341","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI 3D3-0613 - Superseded","offer_id":40234229760067,"sku":"1001","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/3DVolume_3509e7a2-7305-4f96-8e3f-9168f338d86d.png?v=1776703146"},{"product_id":"c03500-semi-c35-specification-and-guide-for-nitric-acid","title":"C03500 - SEMI C35 - Specification and Guide for Nitric Acid","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Standard is to standardize requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods can be used as long as method validation per SEMI C1 has been demonstrated. This Standard also provides a guide for a grade of nitric acid for which a need has been identified. In the case of this Guide, the test methods may not have been statistically validated yet.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  The scope of this Standard is grades of nitric acid used in the semiconductor industry.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003eSEMI C27 — Specification and Guide for Hydrochloric Acid\u003cbr\u003eSEMI C44 — Specification and Guide for Sulfuric Acid\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI C35-0118 (technical revision)\u003cbr\u003eSEMI C35-0708 (technical revision)\u003cbr\u003eSEMI C35-0301 (technical revision)\u003cbr\u003eSEMI C35-0699 (first published - replaces SEMI C1.12, SEMI C7.6, and SEMI C8.6)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C35-0118 - Inactive","offer_id":43106910175299,"sku":"2146","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C35-0708 - Superseded","offer_id":40234229956675,"sku":"11858","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C35-0301 - Superseded","offer_id":40234229989443,"sku":"11857","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_9f149f4b-6bad-4a32-8ebb-def8210da619.png?v=1776703091"},{"product_id":"c05800-semi-c58-specification-for-hydrogen","title":"C05800 - SEMI C58 - Specification for Hydrogen","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in November 2016; originally published March 2005; previously published December 2013.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a series of specifications for different grades of hydrogen (H\u003csub\u003e2\u003c\/sub\u003e) that are used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document covers requirements for two grades of hydrogen used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eIf analytical methods are not complete, the requirements are presented as a guideline.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e SEMI C3 — Specifications for Gases\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C58-1116 - Current","offer_id":40234230382659,"sku":"2160","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C58-1213 - Superseded","offer_id":40234230415427,"sku":"11923","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C58-0305 (Reapproved 0211) - Superseded","offer_id":40234230448195,"sku":"11922","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C58-0305 - Superseded","offer_id":40234230480963,"sku":"11921","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_808cdb00-4634-468c-928f-6670e2ef50a1.png?v=1776703080"},{"product_id":"d00300-semi-d3-quality-area-specification-for-flat-panel-display-substrates","title":"D00300 - SEMI D3 - Quality Area Specification for Flat Panel Display Substrates","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003eThis Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www.semiviews.org and www.semi.org in July 2009; originally published in 1991; previously published July 2003.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Document defines various areas on the pattern surface of a flat panel display substrate and describes their relationship. It assumes the existence of terminology and a banking convention described in other SEMI flat panel display documents.\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI D9 — Terminology for FPD Substrates\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D3-91 (Reapproved 0709) - Inactive","offer_id":40234230022211,"sku":"3140","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D3-91 (Reapproved 0703) - Superseded","offer_id":40234230054979,"sku":"12566","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_2e32b622-5e78-4797-a0fc-0be972fa94cc.png?v=1776702983"},{"product_id":"d02700-semi-d27-guide-for-flat-panel-display-equipment-communication-interfaces","title":"D02700 - SEMI D27 - Guide for Flat Panel Display Equipment Communication Interfaces","description":"\u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eThis guide was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on August 28, 2000. Initially available at www.semi.org August 2000; to be published October 2000. \u003c\/font\u003e \u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eThis is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility. \u003c\/font\u003e \u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)\u003c?xml:namespace prefix = o ns = urn:schemas-microsoft-com:office:office \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E23 — Specification for Cassette Transfer Parallel I\/O Interface\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cp class=\"Text\" style=\"MARGIN:\"\u003e\u003cspan style=\"FONT-FAMILY:\" arial\u003e\u003cfont\u003e\u003cfont\u003eSEMI E84 — Specification for Enhanced Carrier Handoff Parallel I\/O\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e \u003cfont\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D27-1000 - Inactive","offer_id":40234230120515,"sku":"3136","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_83188805-9ebf-487f-bb60-6d456c94cd85.png?v=1776702987"},{"product_id":"c05300-semi-c53-specifications-for-dimethyl-sulfoxide-dmso-grades-1-and-2","title":"C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]","description":"\u003cfont face=\"Arial\" size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was reapproved with minor editorial changes.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C53-0704 (Reapproved 0312) - Inactive","offer_id":40234230153283,"sku":"2155","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C53-0704 - Superseded","offer_id":40234230218819,"sku":"11912","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_ad9b5096-3e66-4115-a5c9-c42f5ebbf4a6.png?v=1776703083"},{"product_id":"d03300-semi-d33-measuring-method-of-optical-characteristics-for-backlight-unit","title":"D03300 - SEMI D33 - Measuring Method of Optical Characteristics for Backlight Unit","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003eThis Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www.semi.org in July 2003.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThe electro optical characteristics of backlight unit (BLU) have a great influence on the characteristics of LCD like uniformity, luminance and chromaticity etc. There are many measurement methods for BLU of electro optical characteristics. It is so different that the measurement method for BLU in each company (e.g., the testing position, test condition, equipment concept etc.). Therefore, this Standard will present the general measurement method.\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Standard is applicable to BLU for liquid crystal display (LCD) and the measurement includes only the optical area. The other areas (electric characteristics, reliability, and so forth) are dealt with by other SEMI Standards.\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D33-0703 - Inactive","offer_id":40234230087747,"sku":"3146","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_fb9e68e4-1cf1-444c-bce6-73bfd49cf56a.png?v=1776702975"},{"product_id":"d03500-semi-d35-test-method-for-measurement-of-cold-cathode-fluorescent-lamp-ccfl-characteristics","title":"D03500 - SEMI D35 - Test Method for Measurement of Cold Cathode Fluorescent Lamp (CCFL) Characteristics","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003eThis Standard was technically approved by the Flat Panel Display – Color Filter \u0026amp; Optical Elements Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www.semi.org in July 2009; originally published November 2003.\u003c\/p\u003e \u003cp align=\"justify\"\u003e  \u003c\/p\u003e \u003cp align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThe purpose of this Document is to standardize the method for measurement of electrical and optical characteristics of cold cathode fluorescent lamp (CCFL).\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003eThis method is to be used by CCFL suppliers and users to evaluate quality of products as well as items under development.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThis method shall be used in general for CCFL to measure the initial characteristics of CCFL (single item) and its reliability after tests, and to carry out quality inspection for incoming and outgoing CCFLs.\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D35-1103 (Reapproved 0709) - Inactive","offer_id":40234230186051,"sku":"3149","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D35-1103E - Superseded","offer_id":40234230251587,"sku":"12558","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D35-1103 - Superseded","offer_id":40234230284355,"sku":"12556","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_bd633fbd-9306-4985-9174-2b73edacfb15.png?v=1776702971"},{"product_id":"3d00900-semi-3d9-guide-for-describing-materials-properties-for-a-300-mm-3ds-ic-wafer-stack","title":"3D00900 - SEMI 3D9 - Guide for Describing Materials Properties for a 300 mm 3DS-IC Wafer Stack","description":"\u003cp class=\"StdsText0\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure wafer stacks to be used in a 3DS-IC process.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide provides the tools to describe wafer stacks in a 3DS-IC process. A wafer stacking process takes two or more intermediate wafers and forms a stack, which can then be further processed as if it were a single wafer. After bonding the dimensions of the stack will no longer conform to standard thickness and\/or diameter.\u003cbr\u003e2.2  This Guide describes wafer stacks with nominal diameter of 300 mm, although the actual stack diameter may differ due to process and functional variation.\u003cbr\u003e2.2.1  The diameters of the different wafers that comprise the stack may differ from each other.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI 3D4 — Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp\/Sori, and Flatness of Bonded Wafer Stacks\u003cbr\u003eSEMI M1 — Specification for Polished Single Crystal Silicon Wafers\u003cbr\u003eSEMI M45 — Specification for 300 mm Wafer Shipping System\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI MF534 — Test Method for Bow of Silicon Wafers\u003cbr\u003eSEMI MF657 — Test Method for Measuring Warp and Total Thickness Variation on Silicon Wafers by Noncontact Scanning\u003cbr\u003eSEMI MF1390 — Test Method for Measuring Bow and Warp on Silicon Wafers by Automated Noncontact Scanning\u003cbr\u003eSEMI MF1451 — Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning\u003cbr\u003eSEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI 3D9-0914 (Reapproved 1025)\u003cbr\u003eSEMI 3D9-0914 (Reapproved 0420)\u003cbr\u003eSEMI 3D9-0914 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI 3D9-0914 (Reapproved 1025) - Current","offer_id":43106911682627,"sku":"18794","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI 3D9-0914 (Reapproved 0420) - Superseded","offer_id":43106911715395,"sku":"13814","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI 3D9-0914 - Superseded","offer_id":40234230349891,"sku":"1007","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/3DVolume_b04b04f5-1d09-4f74-8b82-c16d0ca1bb1e.png?v=1776703142"},{"product_id":"d02500-semi-d25-specification-for-flat-panel-display-substrate-shipping-case","title":"D02500 - SEMI D25 - Specification for Flat Panel Display Substrate Shipping Case","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003eThis Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. Available at www.semi.org in July 2006; originally published June 2000.\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\n\u003csup\u003e \u003cp align=\"justify\"\u003eE\u003c\/p\u003e\u003c\/sup\u003e This Standard was editorial modified in October 2003 to correct general editorial errors. Changes were made to §§ 3.2.2, 6.2.8.1, 6.2.9.1, and A3-1 (figure). \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Document provides the packing and shipping specifications and\/or guides for FPD glass substrates, which are called fourth generation substrates (800 × 950 × 0.7 mm or 800 × 950 × 1.1 mm).\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThe objective of this Document is to provide cost-effective packing and shipping in terms of packing materials, storage, and shipping, while making sure that packing meets the quality and automation requirements.\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Document defines a specification for a full box type shipping case (see Figure 2) to be used for packing and shipping of 4\u003csup\u003eth\u003c\/sup\u003e generation FPD glass substrates from the manufacturer of the glass substrate to the user.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThe application of this packing specification is limited to the following four FPD glass substrates:\u003c\/p\u003e \u003cp align=\"justify\"\u003eBare glass substrates which can be used as array substrates, and do not have film deposition.\u003c\/p\u003e \u003cp align=\"justify\"\u003eBare glass substrates which can be used as facing substrates and color filter substrates, and do not have film deposition.\u003c\/p\u003e \u003cp align=\"justify\"\u003eArray substrates which do have film deposition.\u003c\/p\u003e \u003cp align=\"justify\"\u003eFacing substrates and color filter substrates which do have film deposition.\u003c\/p\u003e \u003cp align=\"left\"\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI D9 — Terminology for FPD Substrates\u003cbr\u003e SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes\u003cbr\u003e SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D25-0600E (Reapproved 0706) - Inactive","offer_id":40234230513731,"sku":"3133","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D25-0600E - Superseded","offer_id":40234230612035,"sku":"12540","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_af6c64d3-8a83-4e45-a890-e89712097530.png?v=1776702989"},{"product_id":"c06400-semi-c64-統計的出荷管理に関するsemiガイドライン","title":"C06400 - SEMI C64 - 統計的出荷管理に関するSEMIガイドライン","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cb\u003eNOTICE: \u003c\/b\u003eThis translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e免責事項：\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e　このSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\"\u003e \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e出荷管理\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e (\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSTC) \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cspan lang=\"JA\"\u003e\u003cfont size=\"2\"\u003e限界を規定および維持する目的で，プロセスデータから統計的に導かれる限界値を定量的に決定するためのガイドラインを提示する。\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cspan lang=\"JA\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cspan lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこのガイドは，顧客からの通知，交渉により決定する製品の特性，あるいは統計的な仕様に基づいて決定することができる統計的に導かれた管理限界を使用することが望ましい，特定の製品の指定された特性に適用される。\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont face=\"Arial\"\u003e\u003cfont face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI C10 — Guide for Determination of Method Detection Limits\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C64-0308 (Reapproved 1214) - Inactive","offer_id":43106909814851,"sku":"2165","price":457.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C64-0308 - Superseded","offer_id":40234230644803,"sku":"11940","price":457.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_de7ada2b-9d3e-4017-941d-077c8b4209a4.png?v=1776703077"},{"product_id":"c00603-semi-c6-3-パイプラインガスとして授受されるグレード20-0-2水素h2に対するパーティクル仕様","title":"C00603 - SEMI C6.3 - パイプラインガスとして授受されるグレード20\/0.2水素（H2）に対するパーティクル仕様","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.\u003c\/font\u003e\u003c\/p\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e免責事項：\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e　このSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont size=\"2\"\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eスタンダードは，\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eGases Global Technical Committee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで技術的に承認されている。現版は2011\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年9\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月12\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e日，global Audits and Reviews Subcommittee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにて発行が承認された。2011\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年11\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月にwww.semiviews.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eおよび www.semi.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで入手可能となる。初版は1989\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年発行。前版は2003\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年3\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月発行。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI　C97.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本書の目的は，\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e(1) 20\/0.2\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e水素ガスの最大許容パーティクル濃度を設定すること(2)\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eその確認のための基準方法を記述することである。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e本書はパイプラインを通して授受される水素ガスにのみ適用される。シリンダ充填ガスまたは液体状のガスには適用されない。\u003c\/p\u003e\n\u003cfont face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C6.3-89  (Reapproved 1111) - Replaced","offer_id":40234230546499,"sku":"2736","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_95ff08cf-5e7d-4b9c-b6d7-d47d9ae115c6.png?v=1776703030"},{"product_id":"d02100-semi-d21-fpdマスクパターン精度の用語","title":"D02100 - SEMI D21 - FPDマスクパターン精度の用語","description":"\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cspan lang=\"EN\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp align=\"justify\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e本スタンダードは，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Flat Panel Display Committee\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eで技術的に承認されている。現版は\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2006\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e5\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e16\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e日，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eglobal Audits and Reviews Subcommittee\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eにて発行が承認された。\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2006\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e6\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月に\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003ewww.semi.org\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eで，そして\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2006\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e7\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月に\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eCD-ROM\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eで入手可能となる。初版は\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e1992\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年発行，前版は\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e2000\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e年\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e10\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e月発行。\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"left\"\u003e　\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e \u003c\/font\u003e\u003c\/font\u003e\u003cp align=\"justify\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eこの文書は，\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eFPD\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e用マスクの欠陥用語を定義する。このスタンダードにより，技術会議や商談の場などで使用される用語が明確になり，マスクに関する標準化が促進されることをねらいとしている。\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e \u003c\/font\u003e\u003c\/font\u003e\u003cp align=\"justify\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eこれらの用語は，主に\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003eFPD\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003eを製造するのに使用するフォトマスクに適用される。\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D21-0706 - Superseded","offer_id":40234230710339,"sku":"3127","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_663c1795-119a-4859-b6f5-ef2b02c5402b.png?v=1776702993"},{"product_id":"c02700-semi-c27-specification-and-guide-for-hydrochloric-acid","title":"C02700 - SEMI C27 - Specification and Guide for Hydrochloric Acid","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Standard is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications. Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1. This Standard also provides a Guide for tiers of hydrochloric acid for which a need has been identified. In the case of the Guide, the test methods may not have been statistically validated.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  The scope of this Standard is grades and tiers of hydrochloric acid used in the semiconductor industry.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003eSEMI C35 — Specification and Guide for Nitric Acid\u003cbr\u003eSEMI C44 — Specification and Guide for Sulfuric Acid\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI C27-0918 (technical revision)\u003cbr\u003eSEMI C27-0118 (technical revision)\u003cbr\u003eSEMI C27-0708 (technical revision)\u003cbr\u003eSEMI C27-0301 (technical revision)\u003cbr\u003eSEMI C27-0600 (technical revision)\u003cbr\u003eSEMI C27-0699 (first published - replaces SEMI C1.7, SEMI C7.2, SEMI C8.2, SEMI C11.6, and SEMI C12.2)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C27-0918 - Inactive","offer_id":43106910797891,"sku":"2119","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C27-0118 - Superseded","offer_id":40234230841411,"sku":"11757","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C27-0708 - Superseded","offer_id":40234230906947,"sku":"11759","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C27-0301 - Superseded","offer_id":40234230972483,"sku":"11758","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_0eee006c-29be-4cab-b1e9-01e1159b4a03.png?v=1776703123"},{"product_id":"d03800-semi-d38-guide-for-quality-area-of-lcd-masks","title":"D03800 - SEMI D38 - Guide for Quality Area of Flat Panel Display (FPD) Masks","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Guide defines the quality area of FPD masks.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThis Guide applies to masks that are principally used in fabricating flat panel displays. The mask size specifies range from 202.8 mm × 202.8 mm to 1620 mm × 1780 mm.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eSubstrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1).\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI D6 — Specification for Flat Panel Display (FPD) Mask Substrates\u003cbr\u003eSEMI P1 — Specification for Hard Surface Photomask Substrates\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI D38-0624 (technical revision)\u003cbr\u003eSEMI D38-0723 (technical revision)\u003cbr\u003eSEMI D38-0211 (Reapproved 0117)\u003cbr\u003eSEMI D38-0211 (technical revision)\u003cbr\u003eSEMI D38-0304 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D38-0624 - Current","offer_id":43106907193411,"sku":"17687","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D38-0723 - Superseded","offer_id":43106907226179,"sku":"17022","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D38-0211 (Reapproved 0117) - Superseded","offer_id":43106907258947,"sku":"3153","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D38-0211 - Superseded","offer_id":40234230743107,"sku":"12560","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D38-0304 - Superseded","offer_id":40234230808643,"sku":"12562","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_cdd6012f-9384-4436-81c3-00daaedd33dd.png?v=1776702967"},{"product_id":"d01100-semi-d11-specification-for-flat-panel-display-glass-substrate-cassettes","title":"D01100 - SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes","description":"\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003eThis Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www.semi.org in July 2009; originally published in 1995; previously published July 2003.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Document describes cassettes that are used with glass substrates in the fabrication and processing of subassemblies and masks for flat panel displays (FPD).\u003c\/p\u003e \u003cp align=\"justify\"\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003eThis Document applies to cassettes that hold a quantity of rectangular FPD substrates. Selected terms and definitions and summary specifications are included. The specifications for single-substrate cassettes will be developed in other documents.\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI D3 — Quality Area Specification for Flat Panel Display Substrates\u003cbr\u003e SEMI D5 — Standard Size for Flat Panel Display Substrates\u003cbr\u003e SEMI D6 — Specification for Edge Length and Thickness for Liquid Crystal Display (LCD) Mask Substrates\u003cbr\u003e SEMI D9 —Terminology for FPD Substrates\u003cbr\u003e SEMI D21 — Definitions for Flat Panel Display Masks\u003cbr\u003e SEMI E1 — Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D11-95 (Reapproved 0709) - Inactive","offer_id":40234231038019,"sku":"3110","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI D11-95 (Reapproved 0703) - Superseded","offer_id":40234231103555,"sku":"12521","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_6062c8ec-a73a-4670-a5b0-fe3738d8519a.png?v=1776703005"},{"product_id":"3d00100-semi-3d1-スルーシリコンビアtsvの幾何学的計測のための用語","title":"3D00100 - SEMI 3D1 - スルーシリコンビア（TSV）の幾何学的計測のための用語","description":"\u003cspan lang=\"EN\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e免責事項：\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e　この\u003c\/font\u003e\u003c\/font\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e本スタンダードは，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e3DS-IC Global Technical Committee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで技術的に承認されている。現版は\u003c\/font\u003e\u003c\/font\u003e2012\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年\u003c\/font\u003e\u003c\/font\u003e8\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月\u003c\/font\u003e\u003c\/font\u003e30\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e日，\u003c\/font\u003e\u003c\/font\u003eglobal Audits and Reviews Subcommittee\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにて発行が承認された。\u003c\/font\u003e\u003c\/font\u003e2012\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e年\u003c\/font\u003e\u003c\/font\u003e9\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e月に\u003c\/font\u003e\u003c\/font\u003ewww.semiviews.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eおよび\u003c\/font\u003e\u003c\/font\u003e www.semi.org\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eで入手可能となる。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e購入者と計測機器メーカや製造者間での効果的な情報伝達や誤解防止のために，明確で一般に認められる用語の定義が必要である。この文書の目的は，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eTSV\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eにとって重要な計測に関する問題の理解と議論を行うための一貫した用語を規定することである。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003c\/font\u003e \u003c\/p\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこの文書の範囲は，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eTSV\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eを特性化する測定数値を規定するための用語の定義に限定される。この文書は，測定手順は記述していないが，測定量を明確に，有益に，また一義的に規定を行う。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこの文書は，幾何学的寸法に関連した計測や，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eTSV\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e開口を含んだ構造の製造および検査作業の定義や管理に重要な測定量に焦点を当てている。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこの文書は，シリコンの\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eTSV\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eを対象とする。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこの文書は，\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eSEMI E89\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e等で網羅しており，統計的な考察を議論することは行わない。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp align=\"justify\"\u003e　\u003c\/p\u003e\u003c\/font\u003e\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e \u003cp align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eこの文書は，その他の\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003eSEMI\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003e文書，特に\u003c\/font\u003e\u003c\/font\u003eSEMI P35\u003cfont lang=\"JA\"\u003e\u003cfont lang=\"JA\"\u003eから構造や用語を引用している。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cfont face=\"Arial\"\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp align=\"justify\"\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI 3D1-0912 - Superseded","offer_id":40234230939715,"sku":"1396","price":231.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/3DVolume_813953b6-f56e-406c-8198-e9fc63ff020b.png?v=1776703134"},{"product_id":"c00305-semi-c3-5-standard-for-nitrogen-n2-bulk-liquid-99-998-quality","title":"C00305 - SEMI C3.5 - Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at www.semi.org in September 1999; originally published in 1981; previously published in 1993.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earth’s atmosphere; colorless liquid. Noncombustible; a cryogenic gas derived from liquid air by fractional distillation.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eNone.\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.5-93 (Withdrawn 0303) - Replaced","offer_id":40234230874179,"sku":"2733","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_afbc29a1-9727-487d-b3c5-94ffb106440c.png?v=1776703016"},{"product_id":"c04400-semi-c44-specification-and-guide-for-sulfuric-acid","title":"C04400 - SEMI C44 - Specification and Guide for Sulfuric Acid","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The first purpose of this Specification and Guide is to standardize requirements for Grades of sulfuric acid used in the semiconductor industry and to document testing procedures that may be used to support those requirements. Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation.\u003cbr\u003e1.2  This Specification and Guide also provides assay and impurity limits for higher purity Tiers of sulfuric acid for which a need has been identified.\u003cbr\u003eNOTE 1: In the case of these Tiers, test methods have not been published or have not yet been statistically validated.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  The scope of this Specification and Guide is two Grades and three Tiers of sulfuric acid used in the semiconductor industry.\u003cbr\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eSEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003eSEMI C27 — Specification and Guide for Hydrochloric Acid\u003cbr\u003eSEMI C35 — Specification and Guide for Nitric Acid\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI C44-1223 (technical revision)\u003cbr\u003eSEMI C44-0618 (technical revision)\u003cbr\u003eSEMI C44-0514 (technical revision)\u003cbr\u003eSEMI C44-0708 (technical revision)\u003cbr\u003eSEMI C44-0301 (technical revision)\u003cbr\u003eSEMI C44-1000 (technical revision)\u003cbr\u003eSEMI C44-0699 (first published - replaces SEMI C1.16, SEMI C7.8, SEMI C8.8, and SEMI C11.5)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C44-1223 - Current","offer_id":43106910076995,"sku":"17295","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C44-0618 - Superseded","offer_id":43106910109763,"sku":"2150","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C44-0514 - Superseded","offer_id":40234231070787,"sku":"11889","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C44-0708 - Superseded","offer_id":40234231136323,"sku":"11890","price":193.0,"currency_code":"USD","in_stock":true},{"title":"SEMI C44-0301 - Superseded","offer_id":40234231169091,"sku":"11888","price":193.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_4475229e-0be8-482f-9b12-c6346cdaf91b.png?v=1776703087"}],"url":"https:\/\/store-dev2.semi.org\/en-nl\/collections\/popular-standards.oembed?page=69","provider":"SEMI Dev 2","version":"1.0","type":"link"}