Japan StoreHistorical Individual Standards
Historical versions of SEMI Standards are available for purchase. If a document is not available on the Historical Standards page, please contact customer service at 408.943.6901, or by email at customerservice@semi.org, to request that it be added.
Please be aware that information contained in older versions of SEMI Standards may be obsolete. SEMI encourages the use of current Standards.
936 products
SEMI P6 - Specification for Registration Marks for Photomasks
Sale priceMember Price: €113,00
Non-Member Price: €171,95
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SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
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SEMI M39 - 半絶縁GaAs単結晶の抵抗率及びホール係数を測定しホール移動度を決定する方法
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Non-Member Price: €205,95
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SEMI C40 - 水酸化カリウム45%溶液の仕様
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Non-Member Price: €205,95
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SEMI C3.39 - 三フッ化窒素（NF3）99.98%品質の仕様
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Non-Member Price: €205,95
SEMI M78 - 量産時における130nmから22nm世代のパターンなしシリコンウェーハ上のナノトポグラフィー決定に関するガイド
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SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals
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Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI M20 - ウェーハ座標システムの確立の作業方法
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Non-Member Price: €205,95
SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate
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Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI M26 - ウェーハの運搬に使用される100 mm，125 mm，150 mm，200 mmウェーハシッピングボックスの再利用ガイド
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Popular Standards
SEMI 3D1 - Terminology for Through Silicon via Geometrical Metrology
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SEMIViews Reader
Sale priceMember Price: €875,00
Non-Member Price: €1.768,95
Non-Member Price: €1.768,95
SEMI 3D2 - Specification for Glass Carrier Wafers for 3DS-IC Applications
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI 3D3 - Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames
Sale priceMember Price: €150,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMIViews Reader Plus
Sale priceMember Price: €1.560,00
Non-Member Price: €3.143,95
Non-Member Price: €3.143,95
SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI)
Sale priceMember Price: €113,00
Non-Member Price: €150,95
Non-Member Price: €150,95
SEMI 3D4 - Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI 3D1 - スルーシリコンビア（TSV）の幾何学的計測のための用語
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI)
Sale priceFrom €171,95 EUR