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SEMI P34 - Specification for 230 mm Square Photomask Substrates
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P35 - Terminology for Microlithography Metrology
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P35 - マイクロリソグラフィメトロロジの用語法
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P36 - 測長走査型電子顕微鏡（CD-SEM）用倍率標準試料のガイド
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P37 - 極紫外線リソグラフィマスク基板の仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard
Sale priceFrom €150,95 EUR
SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード（OPEN ARTWORK SYSTEM INTERCHANGE STANDARD）
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard
Sale priceMember Price:
Non-Member Price: €337,95
Non-Member Price: €337,95
SEMI P40 - Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P40 - 極紫外線リソグラフィマスクの取り付けに関する要求条件およびアライメント基準位置の仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P41 - Specification for Mask Defect Data Handling with XML, Between Defect Inspection Tools, Repair Tools, and Review Tools
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P41 - XMLによる，検査装置，修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P43 - Photomask Qualification Terminology
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P44 - Specification for Open Artwork System Interchange Standard (OASIS ®) Specific to Mask Tools
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P44 - マスク装置向けオープン・アートワーク・システム・インターチェンジ・スタンダード（OASIS®）の仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P45 - Specification for Job Deck Data Format for Mask Tools
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95
SEMI P46 - XMLによるフォトマスクのCD計測情報データの仕様
Sale priceMember Price: €135,00
Non-Member Price: €205,95
Non-Member Price: €205,95
SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness
Sale priceMember Price: €113,00
Non-Member Price: €171,95
Non-Member Price: €171,95