{"product_id":"mf002600-semi-mf26-test-method-for-determining-the-orientation-of-a-semiconductive-single-crystal","title":"MF002600 - SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThe orientation of semiconductor crystals and wafers as determined by these test methods is an important materials acceptance requirement because the orientation controls various parameters of semiconductor devices fabricated from the material.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method covers techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low-index atomic plane in single crystals used primarily for semiconductor devices.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eTwo types of test methods are covered as follows:\u003c\/p\u003e\u003cp\u003eTest Method A, X-Ray Diffraction Orientation — This test method may be used for the orientation of all semiconductive single crystals. The X-ray test method is nondestructive and yields the more precise measurement of orientation; however, use of the equipment requires compliance with stringent safety regulations.\u003cbr\u003eTest Method B, Optical Orientation — This test method is limited in application at the present time to elemental semiconductors. The optical test method requires etching the specimen and is therefore destructive of polished wafer surfaces. This test method is less precise than the X-ray test; however, the apparatus required is less complex.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI C28 — Specification for Hydrofluoric Acid\u003cbr\u003eSEMI C30 — Specification for Hydrogen Peroxide\u003cbr\u003eSEMI C40 — Specification for Potassium Hydroxide, 45% Solution\u003cbr\u003eSEMI C43 — Specification for Sodium Hydroxide, 50% Solution\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MF26-0714E (Reapproved 1023)\u003cbr\u003eSEMI MF26-0714E (editorial revision)\u003cbr\u003eSEMI MF26-0714 (technical revision)\u003cbr\u003eSEMI MF26-0305 (Reapproved 0211)\u003cbr\u003eSEMI MF26-0305 (technical revision)\u003cbr\u003eSEMI MF26-87a (Reapproved 1999) (first SEMI publication)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MF26-0714E (Reapproved 1023) - Current","offer_id":43106888613955,"sku":"17458","price":290000.0,"currency_code":"KRW","in_stock":true},{"title":"SEMI MF26-0714E - Superseded","offer_id":43106888646723,"sku":"4952","price":290000.0,"currency_code":"KRW","in_stock":true},{"title":"SEMI MF26-0714 - Superseded","offer_id":40234302570563,"sku":"9928","price":290000.0,"currency_code":"KRW","in_stock":true},{"title":"SEMI MF26-0305 (Reapproved 0211) - Superseded","offer_id":40234302701635,"sku":"9927","price":290000.0,"currency_code":"KRW","in_stock":true},{"title":"SEMI MF26-0305 - Superseded","offer_id":40234302832707,"sku":"9926","price":290000.0,"currency_code":"KRW","in_stock":true},{"title":"SEMI MF26-87a (Reapproved 1999) - Superseded","offer_id":40234302963779,"sku":"9929","price":290000.0,"currency_code":"KRW","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MFVolume_48842234-6563-416b-84f0-ad994e7625ee.png?v=1776702526","url":"https:\/\/store-dev2.semi.org\/en-kr\/products\/mf002600-semi-mf26-test-method-for-determining-the-orientation-of-a-semiconductive-single-crystal","provider":"SEMI Dev 2","version":"1.0","type":"link"}