SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of a Standard before purchasing. SEMI Standards currently use PDF file format and are DRM-protected, which requires Adobe Acrobat Reader and the FileOpen Plug-In. Refer to the DRM FAQs for details.


Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

 

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E07400 - SEMI E74 - 真空ポンプのインタフェースの仕様 - ターボモレキュラーポンプ
E07600 - SEMI E76 - Guide for 300 mm Process Equipment Points of Connection to Facility Services
SEMI E76 - Guide for 300 mm Process Equipment Points of Connection to Facility Services Sale priceMember Price: ₩113
Non-Member Price: ₩290,000
E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases
E07700 - SEMI E77 - マスフローコントローラの換算率の代用ガス使用による計算方法
E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment
E07800 - SEMI E78 - 装置のための静電気放電(ESD)と静電気吸着(ESA)の評価と管理へのガイド
E07900 - SEMI E79 - Specification for Definition and Measurement of Equipment Productivity
SEMI E79 - Specification for Definition and Measurement of Equipment Productivity Sale priceMember Price: ₩113
Non-Member Price: ₩290,000
E08000 - SEMI E80 - Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)
E08000 - SEMI E80 - マスフローコントローラの姿勢感度(取付位置)決定の試験方法
E08100 - SEMI E81 - CIMフレームワークドメインアーキテクチャに関する暫定仕様
E08100 - SEMI E81 - Provisional Specification for CIM Framework Domain Architecture
SEMI E81 - Provisional Specification for CIM Framework Domain Architecture Sale priceMember Price: ₩113
Non-Member Price: ₩290,000
E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM)
SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Sale priceMember Price: ₩113
Non-Member Price: ₩290,000
E08200 - SEMI E82 - 工程間/工程内AMHS SEMの仕様(IBSEM)
SEMI E82 - 工程間/工程内AMHS SEMの仕様(IBSEM) Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
E08300 - SEMI E83 - PGVメカニカルドッキングフランジの仕様
SEMI E83 - PGVメカニカルドッキングフランジの仕様 Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange
SEMI E83 - Specification for PGV Mechanical Docking Flange Sale priceMember Price: ₩113
Non-Member Price: ₩290,000
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