SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

M06300 - SEMI M63 - Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction
M06400 - SEMI M64 - Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
M06500 - SEMI M65 - Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers
M06600 - SEMI M66 - Test Method to Extract Effective Work Function in Oxide and High-K Gate Stacks Using the MIS Flat Band Voltage-Insulator Thickness Technique
M06700 - SEMI M67 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Thickness Data Array Using the ESFQR, ESFQD, and ESBIR Metrics
M06800 - SEMI M68 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD
M07000 - SEMI M70 - Test Method for Determining Wafer-Near-Edge Geometry Using Partial Wafer Site Flatness
M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Sale priceMember Price: ₩113
Non-Member Price: ₩245,000
M07300 - SEMI M73 - Test Method for Extracting Relevant Characteristics from Measured Wafer Edge Profiles
M07400 - SEMI M74 - Specification for 450 mm Diameter Mechanical Handling Polished Wafers
SEMI M74 - Specification for 450 mm Diameter Mechanical Handling Polished Wafers Sale priceMember Price: ₩113
Non-Member Price: ₩245,000
M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers
SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers Sale priceMember Price: ₩113
Non-Member Price: ₩245,000
M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers
M07700 - SEMI M77 - Test Method for Determining Wafer Near-Edge Geometry Using Roll-Off Amount, ROA
M07800 - SEMI M78 - Guide for Determining Nanotopography of Unpatterned Silicon Wafers for the 130 nm to 22 nm Generations in High Volume Manufacturing
M07900 - SEMI M79 - Specification for Round 100 mm Polished Monocrystalline Germanium Wafers for Solar Cell Applications
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More