SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

HB00300 - SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port
SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port Sale priceMember Price: ₩113
Non-Member Price: ₩240,000
HB00400 - SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)
HB00500 - SEMI HB5 - Test Method for Measurement of Saw Marks on Crystalline Sapphire Wafers by Using Optical Probes
HB00600 - SEMI HB6 - Test Method for Measurement of Thickness and Shape of Crystalline Sapphire Wafers by Using Optical Probes
HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes
HB00800 - SEMI HB8 - Test Method for Determining Orientation of a Sapphire Single Crystal - SEMI Dev 2
SEMI HB8 - Test Method for Determining Orientation of a Sapphire Single Crystal Sale priceMember Price: ₩113
Non-Member Price: ₩240,000
HB00900 - SEMI HB9 - Test Method and Acceptance Criteria for Visual Inspection of Surface Defects of GaN Epitaxial Wafers Used for Manufacturing HB-LED
HB01000 - SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers
HB01100 - SEMI HB11 - Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers
HB01200 - SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS)
SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) Sale priceMember Price: ₩113
Non-Member Price: ₩240,000
HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface
M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers - SEMI Dev 2
M00600 - SEMI M6 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
SEMI M6 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells Sale priceMember Price: ₩113
Non-Member Price: ₩240,000
M00800 - SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers
SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers Sale priceMember Price: ₩113
Non-Member Price: ₩240,000
M00900 - SEMI M9 - Specification for Polished Monocrystalline Gallium Arsenide Wafers
SEMI M9 - Specification for Polished Monocrystalline Gallium Arsenide Wafers Sale priceMember Price: ₩113
Non-Member Price: ₩240,000
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More