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SEMI E54.22 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-LINK® IE
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E56 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E56 - 熱マスフローコントローラの精度，直線性，リピータビリティ，短期再現性，ヒステリシス（履歴現象）およびデッドバンドを判断するテスト方法
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E58 - 自動化による信頼性，有用性，および整備性に関するスタンダード（ARAMS）：コンセプト，挙動，およびサービス
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E63 - Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E64 - SEMI E15.1ドッキングインタフェースポートと300 mmカートの仕様
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E66 - Test Method for Determining Particle Contribution by Mass Flow Controllers
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E66 - マスフローコントローラのパーティクル発生測定のテスト方法
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E67 - マスフローコントローラの信頼性測定のためのテスト方法
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E69 - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E70 - Guide for Tool Accommodation Process
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000
SEMI E72 - 300 mm装置の床面積，高さ，重量の仕様ならびにガイド
Sale priceMember Price: ₩135
Non-Member Price: ₩348,000
Non-Member Price: ₩348,000
SEMI E72 - Specification and Guide for Equipment Footprint, Height, and Weight
Sale priceMember Price: ₩113
Non-Member Price: ₩291,000
Non-Member Price: ₩291,000