{"product_id":"s03000-semi-s30-safety-guideline-for-use-of-energetic-materials-in-semiconductor-r-d-and-manufacturing-processes","title":"S03000 - SEMI S30 - Safety Guideline for Use of Energetic Materials in Semiconductor R\u0026D and Manufacturing Processes","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Safety Guideline is intended as a minimum set of safety criteria for the procurement, storage, handling, and use of energetic materials in semiconductor research and development (R\u0026amp;D) and manufacturing processes in all phases of use, from process chemical supply through abatement.\u003cbr\u003e1.2  This Safety Guideline is intended to be industry best practices as of its publication date.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  The scope of this Safety Guideline is energetic materials, as defined in ¶ 5.2.19 and the equipment which contains them.\u003cbr\u003e2.2  This Safety Guideline specifies the testing and criteria for determining whether a material is an ‘energetic material’ in the context of this Safety Guideline.\u003cbr\u003e2.3  This Safety Guideline also describes the minimum characterization data to be provided in research and development, pilot-line, or high-volume semiconductor manufacturing equipment.\u003cbr\u003e2.4  This Safety Guideline provides safety design criteria for process chemical supply, process, and post-process equipment for semiconductor processes using energetic materials.\u003cbr\u003e2.5  This Safety Guideline provides industry-specific criteria, and refers to some of the many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI F66 — Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals\u003cbr\u003eSEMI F96 — Specification for Port Configuration on Canisters to Contain Liquid CVD Precursors\u003cbr\u003eSEMI S1 — Safety Guideline for Equipment Safety Labels\u003cbr\u003eSEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S3 — Safety Guideline for Process Liquid Heating Systems\u003cbr\u003eSEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S7 — Safety Guideline for Evaluation of Personnel and Evaluating Company Qualifications\u003cbr\u003eSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process\u003cbr\u003eSEMI S12 — Environmental, Health, and Safety Guideline for Manufacturing Equipment Decontamination\u003cbr\u003eSEMI S13 — Environmental, Health, and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment\u003cbr\u003eSEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI S30-0824 (delayed revision implementation)\u003cbr\u003eSEMI S30-1023a (delayed revision)\u003cbr\u003eSEMI S30-1023 (technical revision)\u003cbr\u003eSEMI S30-0719E (editorial revision)\u003cbr\u003eSEMI S30-0719 (first published)\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S30-0824 - Current","offer_id":43106868985923,"sku":"17948","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S30-1023a - Superseded","offer_id":43106869018691,"sku":"17375","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S30-1023 - Superseded","offer_id":43106869051459,"sku":"17215","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S30-0719E - Superseded","offer_id":43106869084227,"sku":"14478","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S30-0719 - Superseded","offer_id":40234356015171,"sku":"11163","price":62700.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_ff9902f7-d01f-4f40-a348-e6358f081a6a.png?v=1776701993","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s03000-semi-s30-safety-guideline-for-use-of-energetic-materials-in-semiconductor-r-d-and-manufacturing-processes","provider":"SEMI Dev 2","version":"1.0","type":"link"}