{"product_id":"s02800-semi-s28-safety-guideline-for-robots-and-load-ports-intended-for-use-in-semiconductor-manufacturing-equipment","title":"S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline was technically approved by the Environmental Health \u0026amp; Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in October 2011.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline provides a set of performance and design based safety considerations for load ports and wafer handling robots that are intended to be integrated into semiconductor manufacturing equipment (SME). This Safety Guideline provides additional guidance to manufacturers of load ports and wafer handling robots beyond the general coverage of SEMI S2.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline covers essential safety issues for load ports and wafer handling robots, intended for integration into SME, that might not be covered in other applicable safety guidelines and standards for industrial robots. This Safety Guideline provides guidance for the safety evaluation of load ports and wafer handling robots before integration. This Safety Guideline aids the designers of load ports and wafer handling robots in anticipating safety considerations that will arise during integration into SME.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline guides suppliers of load ports and wafer handling robots concerning the document contents needed by integrators for safety evaluations of their completed SME systems. This Safety Guideline applies to atmospheric and vacuum wafer-handling robots that are manufactured with their supplier’s intention that they be integrated into semiconductor manufacturing equipment. This Safety Guideline applies to load ports that interface with front-opening unified pods (FOUP), standard mechanical interface (SMIF) pods, and cassettes and that are manufactured for integration into semiconductor manufacturing equipment.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline includes safety considerations in addition to those of safety standards for industrial robots. This Safety Guideline applies to wafer handling robots and load ports that are being evaluated independently of SME. The documentation provisions of § 8 are to be applied to load ports and wafer handling robots sold after this safety guideline is published, regardless of design or development date.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003cbr\u003e SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003cbr\u003e SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)\u003cbr\u003e SEMI E63 — Mechanical Specification for 300 mm Box Opener\/Loader to Tool Standard (BOLTS-M) Interface\u003cbr\u003e SEMI E92 — Specification for 300 mm Light Weight and Compact Box Opener\/Loader to Tool-Interoperability Standard (BOLTS\/Light)\u003cbr\u003e SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles\u003cbr\u003e SEMI E117 — Specification for Reticle Load Port\u003cbr\u003e SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment \u003cbr\u003e SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process\u003cbr\u003e SEMI S17 — Safety Guideline for Unmanned Transport Vehicle (UTV) Systems\u003cbr\u003e SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment\u003cbr\u003e SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S28-1011 - Inactive","offer_id":40234343202883,"sku":"6920","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_b9d9ecac-ecb1-4516-b8f9-d20ce930d0d0.png?v=1776702179","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s02800-semi-s28-safety-guideline-for-robots-and-load-ports-intended-for-use-in-semiconductor-manufacturing-equipment","provider":"SEMI Dev 2","version":"1.0","type":"link"}