{"product_id":"s02300-semi-s23-guide-for-conservation-of-energy-utilities-and-materials-used-by-semiconductor-manufacturing-equipment","title":"S02300 - SEMI S23 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;mso-ansi-language:EN-US;mso-bidi-language:AR-SA;mso-fareast-font-family:\"Yu Mincho\";mso-fareast-language:JA;mso-fareast-theme-font:minor-fareast;'\u003e\u003csup\u003eE\u003c\/sup\u003e This Standard was editorially modified in April 2023 to correct an error. A change was made to Equation R2-22.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide addresses concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME).\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide is intended to be a tool that can be used to analyze energy, utilities, and materials use by SME.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide also addresses measurements related to energy, utilities, and materials use in SME.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide also addresses continuous improvement planning for energy, utilities, and materials use in SME in order to promote efficiency.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide is a series of options and instructions intended to increase awareness of the reader to available techniques in the area of energy, utilities, and materials use efficiency. A particular course of action is suggested for energy, utilities, and materials use measurement and conversion of use measurements into equivalent energy.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide describes methods for reporting energy, utilities, and material use rate and efficiency improvement in SME.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy consumption related to SME as well as planning of energy efficiency improvement.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eAdditionally, this Guide describes setting targets for, verifying, and improving the use or efficiency of utilities, materials, or energy.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eThis Guide addresses the process, idle, rest, and sleep modes of the use stage of the SME life cycle.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI E6 — Guide for Semiconductor Equipment Installation Documentation\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S2 — Environment, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-1021E2 (editorial revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-1021E (editorial revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-1021 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-1216E (editorial revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-1216 (complete rewrite)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-0813 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-0311 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-0708 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-0705 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;font-size:10.0pt;line-height:107%;'\u003eSEMI S23-0305 (first 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