{"product_id":"s02200-semi-s22-safety-guideline-for-the-electrical-design-of-semiconductor-manufacturing-equipment","title":"S02200 - SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Safety Guideline provides a set of design-based\n        electrical safety considerations for production equipment used in the\n        semiconductor industry. Basic product safety concerns are addressed by\n        satisfying the design, construction, and testing principles set in this Safety\n        Guideline for protection against electrical shock or fire risk. The intent is\n        to provide a design based electrical document that will be useful to both\n        design engineers and evaluators, in order to facilitate electrical safety in\n        the equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eThis Safety Guideline provides\n        a set of design based electrical safety considerations for production equipment\n        used in the semiconductor industry.\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\n        \u003co:p\u003e\u003c\/o:p\u003e\n    \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eBasic product safety concerns\n            can be addressed by satisfying the design, construction, and testing principles\n            set forth in this Document or by satisfying the requirements of applicable\n            electrical safety standards.\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\n            \u003co:p\u003e\u003c\/o:p\u003e\n        \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eThis Safety Guideline applies\n            to semiconductor manufacturing equipment.\u003c\/span\u003e\u003cspan style='font-size:\n10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\n            \u003co:p\u003e\u003c\/o:p\u003e\n        \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eIncluded in this Safety\n            Guideline are design considerations for electrical safety interlocks that\n            protect against electrical as well as nonelectrical safety hazards; and\n            nonelectrical interlocks that protect against electrical safety hazards.\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\n            \u003co:p\u003e\u003c\/o:p\u003e\n        \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eThis Document applies to the\n            electrical design for all equipment used to manufacture, measure, assemble, and\n            test semiconductor products unless the equipment is specifically excluded. See\n            § \u003c\/span\u003e\n        \u003c!--[if supportFields]\u003e\u003cspan style=\"mso-bookmark:_Toc430706662\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-element:field-begin\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-bookmark:_Toc430706662\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\nREF\u003cspan style=\"mso-spacerun:yes\"\u003e  \u003c\/span\u003e_Ref520800897 \\h \\r \\t\u003cspan style=\"mso-spacerun:yes\"\u003e  \u003c\/span\u003e\\* MERGEFORMAT \u003cspan style=\"mso-element:field-separator\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style=\"mso-bookmark:_Toc430706662\"\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003e3\n                \u003c!--[if gte mso 9]\u003e\u003cxml\u003e\n \u003cw:data\u003e08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000E0000005F005200650066003500320030003800300030003800390037000000\u003c\/w:data\u003e\n\u003c\/xml\u003e\u003c![endif]--\u003e\n            \u003c\/span\u003e\u003c\/span\u003e\n        \u003c!--[if supportFields]\u003e\u003cspan style=\"mso-bookmark:\n_Toc430706662\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-element:field-end\"\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style=\"mso-bookmark:_Toc430706662\"\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003e, Limitations.\u003c\/span\u003e\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\n            \u003co:p\u003e\u003c\/o:p\u003e\n        \u003c\/span\u003e\n\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eThis Safety Guideline applies\n            to equipment intended to be powered by hazardous voltages or hazardous\n            electrical power.\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;\nfont-family:\"Arial\",sans-serif'\u003e\n            \u003co:p\u003e\u003c\/o:p\u003e\n        \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\n        \u003co:p\u003e \u003c\/o:p\u003e\n    \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E33 — Guide for Semiconductor Manufacturing Equipment\n        Electromagnetic Compatibility (EMC)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S1 — Safety Guideline for Equipment Safety Labels\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S2 — Environmental, Health, and Safety Guideline for\n        Semiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S3 — Safety Guideline for Process Liquid Heating\n        System\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S8 — Safety Guideline for Ergonomics Engineering of\n        Semiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S10 — Safety Guideline for Risk Assessment and Risk\n        Evaluation Process\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S13 — Environmental, Health and Safety Guideline for\n        Documents Provided to the Equipment User for Use with Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S14 — Safety Guidelines for Fire Risk Assessment and\n        Mitigation for Semiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\n        \u003co:p\u003e \u003c\/o:p\u003e\n    \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\n        \u003co:p\u003e\u003c\/o:p\u003e\n    \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0718E (editorial revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0718 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0715bE (editorial revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0715b (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0715a (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0715 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0712a (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0712 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1110c (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1110b (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1110a (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1110 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0709b (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0709a (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0709 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0706b (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0706a (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-0706 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1103bE (editorial revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1103b (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1103a (delayed revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI S22-1103 (first published)\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S22-0718E - Current","offer_id":40234336026691,"sku":"5550","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S22-0718 - Superseded","offer_id":40234336059459,"sku":"6636","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S22-0715bE - Superseded","offer_id":40234336092227,"sku":"6635","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S22-0715b - Superseded","offer_id":40234336124995,"sku":"6634","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S22-0715a - Superseded","offer_id":40234336157763,"sku":"6633","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S22-0715 - 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