{"product_id":"s01800-semi-s18-environmental-health-and-safety-guideline-for-flammable-silicon-compounds","title":"S01800 - SEMI S18 - Environmental, Health and Safety Guideline for Flammable Silicon Compounds","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline was technically approved by the Environmental Health \u0026amp; Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in August 2018; originally published November 2002; previously published March 2012.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline is intended as a minimum set of safety and health criteria for storage, handling, and use of flammable silicon compounds from supply to abatement.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Safety Guideline is also intended as a minimum set of safety and health design criteria for semiconductor, FPD, PV manufacturing equipment and other equipment that uses flammable silicon compounds for processing.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eFlammable silicon compounds that are within the scope of this Safety Guideline are shown in Table 1.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eFlammable mixtures containing flammable silicon compounds included in the Table 1 are also within the scope of this Safety Guideline.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eIn some sections of this Safety Guideline, as well as in some of the included supplementary materials, the columns to the right of the text designate to which flammable silicon compounds the text applies. In the headers of those columns: \"CG\" designates ‘compressed gas,’ \"LG\" designates ‘liquefied compressed gas,’ and \"L\" designates ‘liquid.’ Where there are no such columns, the material applies to all of the flammable silicon compounds included in the scope of this Document.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components\u003cbr\u003e SEMI F5 — Guide for Gaseous Effluent Handling\u003cbr\u003e SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems\u003cbr\u003e SEMI S1 — Safety Guideline for Equipment Safety Labels\u003cbr\u003e SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003cbr\u003e SEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets\u003cbr\u003e SEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves\u003cbr\u003e SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment\u003cbr\u003e SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process\u003cbr\u003e SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment\u003cbr\u003e SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S18-0818 - Current","offer_id":40234320003139,"sku":"5546","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S18-0312 - Superseded","offer_id":40234320166979,"sku":"6580","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S18-1102 - Superseded","offer_id":40234320232515,"sku":"6581","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_46829277-7ba6-4fec-894b-136397942bac.png?v=1776702384","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s01800-semi-s18-environmental-health-and-safety-guideline-for-flammable-silicon-compounds","provider":"SEMI Dev 2","version":"1.0","type":"link"}