{"product_id":"s01600-semi-s16-guide-for-semiconductor-manufacturing-equipment-design-for-reduction-of-environmental-impact-at-end-of-life","title":"S01600 - SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Environmental, Health, \u0026amp; Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in August 2012; originally published June 2000; previously published March 2007.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was reapproved with minor editorial changes.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document provides design guides to minimize environmental impacts in consideration of end of life of semiconductor manufacturing equipment (SME) or its components.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Guide addresses design considerations to minimize environmental impact of SME or component disposal at end of life.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Guide addresses design considerations to encourage reuse or recycling of SME or its components.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Guide contains the following items:\u003c\/p\u003e \u003cul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003ePurpose\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eScope\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eLimitations\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eReferenced Standards and Documents\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eTerminology\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eGeneral Concept\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eMaterial Selection\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eIdentification for Reusability or Recyclability\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eDesign for Reusability or Recyclability\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003eDocuments to be Prepared by the Equipment Supplier\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003cbr\u003e SEMI S12 — Guidelines for Equipment Decontamination\u003cbr\u003e SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S16-0307 (Reapproved 0812) - Inactive","offer_id":40234344775747,"sku":"6854","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S16-0307 - Superseded","offer_id":40234344808515,"sku":"6857","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S16-0600 - Superseded","offer_id":40234344874051,"sku":"6859","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_b8cc2260-1f74-4dba-848d-873d5d64c6da.png?v=1776702202","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s01600-semi-s16-guide-for-semiconductor-manufacturing-equipment-design-for-reduction-of-environmental-impact-at-end-of-life","provider":"SEMI Dev 2","version":"1.0","type":"link"}