{"product_id":"s00600-semi-s6-半導體製造設備排氣通風基準","title":"S00600 - SEMI S6 - 半導體製造設備排氣通風基準","description":"\u003cp class=\"StdsText\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;background:white; \n \n mso-fareast-language:ZH-TW;mso-bidi-font-weight:bold'\u003eNOTICE\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;background:white;mso-fareast-language: \n \n ZH-TW'\u003e: This translation is a REFERENCE COPY ONLY. If differences should exist \n \n between the English version and a translation in any other language, the \n \n English version is the official and authoritative version.\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family: DFKai-SB;\"\u003e注意：\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family: DFKai-SB;\"\u003e這個翻譯是一個參考版本。如果您在使用上，發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處，請務必參考英文原文版本，並以英文原文版本為主，英文原文版本屬於正式和權威的版本。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsFigureTableSpace\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText0\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family: \n \n Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial;mso-fareast-language: \n \n ZH-TW;mso-bidi-font-weight:bold\"\u003e注意：本基準中使用「應」字之條款，表示必須聲明符合本文所述之內容。使用「可」、「建議」、「優先」、「提議」、「註」或「相關資訊」之條款，表示並非必須聲明符合本文所述之內容。\u003c\/span\u003e\u003cspan class=\"TextCharCharCharCharChar\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"font-family:DFKai-SB; \n \n mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial\"\u003e本安全基準係在提供半導體製造設備（\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003eSe\u003cspan style=\"letter-spacing:-.1pt\"\u003em\u003c\/span\u003e\u003cspan style=\"letter-spacing:.05pt\"\u003ei\u003c\/span\u003ec\u003cspan style=\"letter-spacing:.05pt\"\u003eo\u003c\/span\u003end\u003cspan style=\"letter-spacing:.05pt\"\u003eu\u003c\/span\u003ector \n \n Manufac\u003cspan style=\"letter-spacing:-.1pt\"\u003et\u003c\/span\u003eur\u003cspan style=\"letter-spacing: \n \n -.1pt\"\u003ei\u003c\/span\u003e\u003cspan style=\"letter-spacing:.05pt\"\u003en\u003c\/span\u003eg\u003cspan style=\"letter-spacing:-.05pt\"\u003e E\u003c\/span\u003equ\u003cspan style=\"letter-spacing:-.1pt\"\u003ei\u003c\/span\u003ep\u003cspan style=\"letter-spacing:-.1pt\"\u003em\u003c\/span\u003eent\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-family: \n \n \"MS Mincho\";mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003eSME\u003c\/span\u003e\u003cspan lang=\"JA\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family: \n \n Arial;mso-bidi-font-family:Arial\"\u003e）之排氣通風安全性能標準，以及評估此類標準的測試方法。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB; \n \n mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial;mso-fareast-language:ZH-TW\"\u003e在現今強調能源效益及實體限制的趨勢下，使用者設施中排氣通風設備的最佳化越顯重要。採用高效益設計的排氣通風設施可防止人員、財產及環境之健康與安全受到傷害。本安全基準之目的係在提供排氣通風的效能、設計原理、測試方法及標準。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family: \n \n Arial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e本基準適用於連接至使用者設施排氣通風系統之可排氣通風的半導體製造設備。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB; \n \n mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial;mso-fareast-language:ZH-TW\"\u003e本文之標準應適用於（全部或部分）人員保護、設備保護及降低火災風險之排氣通風系統。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB; \n \n mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial;mso-fareast-language:ZH-TW\"\u003e本文所述之效能與評估標準適用於所有由供應商提供予使用者或其他供應商的設備，或是由供應商提供給其他供應商、再由其他供應商提供給使用者的部分設備。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB; \n \n mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial;mso-fareast-language:ZH-TW\"\u003e本文旨在協助半導體設備供應商依共同的性能標準來設計設備排氣通風系統，並協助使用者與供應商瞭解設備系統的各項排氣通風需求。但本文件非在建立設計之規範。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family: \n \n Arial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e測試方法詳見第\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-language:ZH-TW'\u003e§ \u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style=\"mso-bookmark:_Toc515897748\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-element:field-begin\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-bookmark:_Toc515897748\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e REF\u003cspan style=\"mso-spacerun:yes\"\u003e \u003c\/span\u003e_Ref515551479 \\h \\r \\t\u003cspan style=\"mso-spacerun:yes\"\u003e \u003c\/span\u003e\\* MERGEFORMAT \u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"mso-bookmark:_Toc515897748\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cspan style=\"mso-element:field-separator\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e8\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003c!--[if gte mso 9]\u003e\u003cxml\u003e \n \n  \u003cw:data\u003e08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000E0000005F005200650066003500310035003500350031003400370039000000\u003c\/w:data\u003e \n \n \u003c\/xml\u003e\u003c![endif]--\u003e\u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style=\"mso-bookmark: \n \n _Toc515897748\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-element:field-end\"\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family: \n \n Arial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e節及數項附錄。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB; \n \n mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family: \n \n Arial;mso-fareast-language:ZH-TW\"\u003e本文並未限制供應商或使用者所採用的危險評量方法或控制策略（即設計原理）。若已提供充分程度之保護，亦可採用多項不同方法。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB; \n \n mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp\u003e \n \n  \n \n \n \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003c\/font\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eSEMI F5 — Guide for Gaseous Effluent Handling\u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eSEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eSEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation of Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003cbr\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eSEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003cp\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S6-0618 - Current","offer_id":40234340024387,"sku":"13637","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S6-0707E - Superseded","offer_id":40234340122691,"sku":"6932","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S6-0707 - Superseded","offer_id":40234340188227,"sku":"6931","price":62700.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_71004f52-b807-4006-9a6d-29b51d209742.png?v=1776702170","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s00600-semi-s6-%e5%8d%8a%e5%b0%8e%e9%ab%94%e8%a3%bd%e9%80%a0%e8%a8%ad%e5%82%99%e6%8e%92%e6%b0%a3%e9%80%9a%e9%a2%a8%e5%9f%ba%e6%ba%96","provider":"SEMI Dev 2","version":"1.0","type":"link"}