{"product_id":"s00400-semi-s4-safety-guideline-for-the-segregation-separation-of-gas-cylinders-contained-in-cabinets","title":"S00400 - SEMI S4 - Safety Guideline for the Segregation\/Separation of Gas Cylinders Contained in Cabinets","description":"\u003cp\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cb style=\"font-size: small; font-family: Arial, sans-serif;\"\u003eNOTICE:\u003c\/b\u003e\u003cspan style=\"font-size: small; font-family: Arial, sans-serif;\"\u003e This Standard or Safety Guideline has an Inactive\nStatus because the conditions to maintain Current Status have not been met.\nInactive Standards or Safety Guidelines are available from SEMI and continue to\nbe valid for use.\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Safety Guideline provides a method for determining\ncylinders of which types of chemicals should be in separate gas cabinets and\nwhich cylinders may be in gas cabinets with each other.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Safety Guideline is intended to be used by those\nworking or doing research in semiconductor-related technology.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Safety Guideline refers to chemicals, which includes\ngases and liquids, contained in cylinders, that are used in gaseous form\nbecause of their vapor pressure or because they may be transported as a vapor\nby a carrier gas.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eIt also pertains to all types of cylinders, up to and including\nan internal volume of 1000 liters.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThe primary intent of this Safety Guideline is directed to\na cylinder gas in use in, or being dispensed in, the research and manufacturing\nprocesses.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Safety Guideline addresses purge gases supplied in\ncylinders and used to purge process chemical lines.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Safety Guideline addresses process chemicals in\ncylinders which are designed to provide them at pressures less than 101.3 kPa\n(one atmosphere).\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003c\/font\u003e\u003c\/span\u003e\u003cspan style=\"font-size: small; font-family: Arial, sans-serif;\"\u003e \u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eNone.\u003c\/font\u003e\u003cspan style=\"font-size: 10.5pt;\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI S4-0304 (complete rewrite)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\n\n\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI S4-92 (first published)\u003c\/font\u003e\u003cspan style=\"font-size: 10.5pt;\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cbr\u003e","brand":"semi.org","offers":[{"title":"SEMI S4-0304 - Inactive","offer_id":40234341498947,"sku":"14259","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S4-92 - Superseded","offer_id":40234341597251,"sku":"6929","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_443b00cf-0c33-4937-af16-e524d7cd865b.png?v=1776702172","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s00400-semi-s4-safety-guideline-for-the-segregation-separation-of-gas-cylinders-contained-in-cabinets","provider":"SEMI Dev 2","version":"1.0","type":"link"}