{"product_id":"s00300-semi-s3-製程液體加熱系統安全基準","title":"S00300 - SEMI S3 - 製程液體加熱系統安全基準","description":"\u003cp class=\"StdsText\"\u003e\u003cfont size=\"2\"\u003e\u003cb\u003e\u003cspan style='font-family:\"Arial\",sans-serif;background:\nwhite;mso-fareast-language:ZH-TW'\u003eNOTICE\u003c\/span\u003e\u003c\/b\u003e\u003cb\u003e\u003cspan style='font-family:\"Arial\",sans-serif;background:white;\nmso-fareast-language:ZH-TW'\u003e: \u003c\/span\u003e\u003c\/b\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nbackground:white;mso-fareast-language:ZH-TW'\u003eThis translation is a REFERENCE\nCOPY ONLY. \u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;background:white'\u003eIf\ndifferences should exist between the English version and a translation in any\nother language, the English version is the official and authoritative version.\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family: DFKai-SB;\"\u003e注意：\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family: DFKai-SB;\"\u003e這個翻譯是一個參考版本。如果您在使用上，發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處，請務必參考英文原文版本，並以英文原文版本為主，英文原文版本屬於正式和權威的版本。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family: DFKai-SB;\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText0\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial;mso-fareast-language:\nZH-TW;mso-bidi-font-weight:bold\"\u003e備註：本安全基準中以「註」為標題的段落並非正式內容，不得以此修改或取代正式的安全基準。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText0\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial;mso-fareast-language:\nZH-TW;mso-bidi-font-weight:bold\"\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText0\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial;mso-fareast-language:\nZH-TW;mso-bidi-font-weight:bold\"\u003e備註：當條文中含有「應」的字眼，表示必須與此文件要求一致。若含有「可」、「建議」、「優先」、「傾向」，或利用註與相關文件說明者，則不須完全依說明執行。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e此份安全基準的目的是作為半導體及面板工業，在改變或維持製程液體溫度的加熱系統之設計及文件提供最基本的一般安全考量。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e此份安全基準提供數種方式（如表\u003c\/span\u003e\u003cspan style='font-family:\n\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003e1\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e），達到製程液體加熱系統（\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003ePLHS\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:\nDFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e）風險不超過等級「低」之風險（風險等級定義於\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003eSEMI S10\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:\nDFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e和\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003eSEMI S14\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e）的方法。然而，如何選用適切的方法，本安全基準並無一定的標準。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-language:ZH-TW'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e此份安全基準為許多常見的製程液體加熱系統（\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003ePLHS\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:\nDFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e）構造提供一個安全功能要求規定表。同時也提供這些安全功能的設計及成效標準。製程液體加熱系統（\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003ePLHS\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:\nDFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e）符合規定的安全功能清冊和設計及成效標準，意味著可使加熱系統之風險不超過「低」風險等級（定義於\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003eSEMI S10\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:\nDFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e和\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003eSEMI S14\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e），以符合這份安全基準的要求。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e亦可經由製程液體加熱系統（\u003c\/span\u003e\u003cspan style='font-family:\n\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003ePLHS\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e）設計及整合被設計、選擇及確認成效之安全功能使製程加熱設備之風險不超過「低」風險等級，來達到符合此安全基準相同成效。如評估利用\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-font-family:DFKai-SB;\nmso-fareast-language:ZH-TW'\u003eSEMI S10\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:\nDFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-fareast-language:ZH-TW\"\u003e和\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-font-family:\"Yu Mincho\";mso-fareast-theme-font:minor-fareast;\nmso-fareast-language:ZH-TW'\u003eSEMI \u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-font-family:DFKai-SB;mso-fareast-language:ZH-TW'\u003eS14\u003c\/span\u003e\u003cspan lang=\"ZH-TW\" style=\"font-family:DFKai-SB;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial;mso-fareast-language:ZH-TW\"\u003e及考量此文件中所討論之危害。\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-fareast-language:ZH-TW'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp\u003e\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNone.\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S3-1211 (Reapproved 1017)E - Current","offer_id":40234347626563,"sku":"13518","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S3-0306 - Superseded","offer_id":40234347692099,"sku":"6926","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_ca777e1b-d236-425e-aa01-7955149a08da.png?v=1776702174","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s00300-semi-s3-%e8%a3%bd%e7%a8%8b%e6%b6%b2%e9%ab%94%e5%8a%a0%e7%86%b1%e7%b3%bb%e7%b5%b1%e5%ae%89%e5%85%a8%e5%9f%ba%e6%ba%96","provider":"SEMI Dev 2","version":"1.0","type":"link"}