{"product_id":"s00200-semi-s2-environmental-health-and-safety-guideline-for-semiconductor-manufacturing-equipment","title":"S00200 - SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment","description":"\u003cp\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003e* This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1 Purpose\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.1 This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2 Scope\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2.1 Applicability — This Safety Guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2.2 Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this Safety Guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E6 — Guide for Semiconductor Equipment Installation Documentation\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI F5 — Guide for Gaseous Effluent Handling\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI F14 — Guide for the Design of Gas Source Equipment Enclosures\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S1 — Safety Guideline for Equipment Safety Labels\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S3 — Safety Guideline for Process Liquid Heating Systems\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S30 — Safety Guideline for Use of Energetic Materials in Semiconductor R\u0026amp;D and Manufacturing Processes\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003eSEMI S2-0724E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0724 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0821Ec (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0821Eb (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0821Ea (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0821 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0818Eb (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0818Ea (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0818E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0818 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-1016b (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-1016a (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-1016 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0715a (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0715 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0712d (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0712c (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0712b (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0712a (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0712 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0310e (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0310d (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0310c (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0310b (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0310a (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0310 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0709 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706e (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706d (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706c (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706b (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706a (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0706 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0703aE (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI S2-0703a (delayed revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan 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