{"product_id":"s00200-semi-s2-반도체-제조장비에-대한-환경안전보건-가이드라인","title":"S00200 - SEMI S2 - 반도체 제조장비에 대한 환경안전보건 가이드라인","description":"\u003cp class=\"StdsText\" style=\"MARGIN:;\"\u003e \u003c\/p\u003e\u003cp class=\"StdsText\" style=\"MARGIN:;\"\u003e\u003cfont lang=\"KO\" size=\"2\" face=\"Arial\"\u003e\u003cspan style=\"FONT-FAMILY:;\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003cstrong\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any language, the English version is the official and authoritative version.\u003c\/strong\u003e\u003cbr\u003e주의: 본 한글본은 참고용으로, 영문원본과 한글본간에 차이가 발생할 경우, 영문원본을 우선으로 해야합니다. 본 한글본에 대한 문의사항이 있는 경우 krstandards@semi.org.로 문의바랍니다.\u003c\/p\u003e\u003cp\u003e\u003cbr\u003e1  목적(Purpose)\u003cbr\u003e1.1  본 안전 가이드라인의 목적은 반도체 제조 장비에 대한 성능을 기반으로 한(performance-based) 일단의 EHS(환경, 보건 및 안전) 고려사항을 제공하는 것이다.\u003cbr\u003e2  적용 범위(Scope)\u003cbr\u003e2.1  적용가능성(Applicability) — 본 안전 가이드라인은 반도체 제품을 제조, 측정, 조립 및 시험하는 데 사용되는 장비에 적용된다.\u003cbr\u003e2.2  섹션별 요구사항의 우선 순위(Precedence of Sectional Requirements) — 본 안전 가이드라인의 내용 간에 충돌이 있는 경우 기술 문제를 구체적으로 다루는 섹션 또는 하위 섹션이 보다 일반적인 섹션 또는 하위 섹션보다 우선한다.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E6 — Guide for Semiconductor Equipment Installation Documentation\u003cbr\u003eSEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services\u003cbr\u003eSEMI F5 — Guide for Gaseous Effluent Handling\u003cbr\u003eSEMI F14 — Guide for the Design of Gas Source Equipment Enclosures\u003cbr\u003eSEMI S1 — Safety Guideline for Equipment Safety Labels\u003cbr\u003eSEMI S3 — Safety Guideline for Process Liquid Heating Systems\u003cbr\u003eSEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications\u003cbr\u003eSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process\u003cbr\u003eSEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination\u003cbr\u003eSEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment\u003cbr\u003eSEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds\u003cbr\u003eSEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S30 — Safety Guideline for Use of Energetic Materials in Semiconductor R\u0026amp;D and Manufacturing Processes\u003cbr\u003e\u003cbr\u003e \u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI S2-0724 - Superseded","offer_id":43106876719171,"sku":"18573","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S2-1016b - Superseded","offer_id":40234351198275,"sku":"6886","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI S2-0712b - Superseded","offer_id":40234351263811,"sku":"6878","price":62700.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/SVolume_fe044917-6bcb-4ab2-ab93-ea6fd4a0c580.png?v=1776702195","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/s00200-semi-s2-%eb%b0%98%eb%8f%84%ec%b2%b4-%ec%a0%9c%ec%a1%b0%ec%9e%a5%eb%b9%84%ec%97%90-%eb%8c%80%ed%95%9c-%ed%99%98%ea%b2%bd%ec%95%88%ec%a0%84%eb%b3%b4%ea%b1%b4-%ea%b0%80%ec%9d%b4%eb%93%9c%eb%9d%bc%ec%9d%b8","provider":"SEMI Dev 2","version":"1.0","type":"link"}