{"product_id":"pv08100-semi-pv81-guide-for-specifying-low-pressure-horizontal-diffusion-furnace","title":"PV08100 - SEMI PV81 - Guide for Specifying Low Pressure Horizontal Diffusion Furnace","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e\u003cstrong\u003e* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.\u003c\/strong\u003e\u003c\/p\u003e\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  Compared with atmospheric horizontal diffusion furnace, low pressure horizontal diffusion technology has advantages of higher volume production, lower space requirement, less energy consumption and better sheet resistance uniformity, but all of these advantages are based on several key parameters of equipment. This Guide is provided as a reference for diffusion furnace equipment manufacturers and customers, so that low pressure horizontal diffusion can achieve less cost and higher performance.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  Low pressure horizontal diffusion furnace described in this Guide is mainly used for building p-n junction under low pressure condition in the silicon solar cells diffusion production line.\u003cbr\u003e2.2  This Guide analyzes several key parameters which influence the diffusion process results in low pressure. These parameters which are verified by series of experiments and tests on the production lines are valuable references for horizontal diffusion furnace equipment manufacturers.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eNone.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI PV81-1125 (technical revision)\u003cbr\u003eSEMI PV81-0318 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI PV81-1125 - Current","offer_id":43106885959747,"sku":"18831","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI PV81-1125 - Current + Redline","offer_id":43106885992515,"sku":"18832","price":38900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI PV81-0318 - Superseded","offer_id":43106886025283,"sku":"5337","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVVolume_98312f78-26f4-4cc7-8592-24ef03d01b1e.png?v=1776702410","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/pv08100-semi-pv81-guide-for-specifying-low-pressure-horizontal-diffusion-furnace","provider":"SEMI Dev 2","version":"1.0","type":"link"}