{"product_id":"pv05300-semi-pv53-test-method-for-in-line-monitoring-of-flat-temperature-zone-in-horizontal-diffusion-furnace","title":"PV05300 - SEMI PV53 - Test Method for In-Line Monitoring of Flat Temperature Zone in Horizontal Diffusion Furnace","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Document covers the test method of flat temperature\nzone in horizontal diffusion furnace including the testing principle, testing\ndevices, environment, testing steps and the calculation of the flat-temperature\nzone.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method is used for testing flat temperature zone\nin horizontal diffusion furnace. Horizontal PECVD equipment, horizontal vacuum\nannealing furnace, horizontal alloy furnace and other similar equipments can\nalso be implemented by reference.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eNone.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI PV53-0514 (Reapproved 1220)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI PV53-0514 (first published)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cbr\u003e","brand":"semi.org","offers":[{"title":"SEMI PV53-0514 (Reapproved 1220) - Current","offer_id":40234333601859,"sku":"14358","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI PV53-0514 - Superseded","offer_id":40234333798467,"sku":"5296","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVVolume_62443aaa-a0d0-4fb6-807e-69f6cb418ab1.png?v=1776702440","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/pv05300-semi-pv53-test-method-for-in-line-monitoring-of-flat-temperature-zone-in-horizontal-diffusion-furnace","provider":"SEMI Dev 2","version":"1.0","type":"link"}