{"product_id":"pv04100-semi-pv41-test-method-for-in-line-noncontact-measurement-of-thickness-and-thickness-variation-of-silicon-wafers-for-pv-applications-using-capacitive-probes","title":"PV04100 - SEMI PV41 - Test Method for In-Line, Noncontact Measurement of Thickness and Thickness Variation of Silicon Wafers for PV Applications Using Capacitive Probes","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003eWafer thickness and its variation across a wafer are important parameters for solar cell manufacturing. Excessive thickness variations within a lot from wafer to wafer or within a wafer may negatively impact process yield and solar cell efficiency.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003eBoth parameters are part of the specification for solar cell wafers (SEMI　PV22), which define a thickness range as well as an upper limit for the total thickness variation (TTV).\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003eIn addition, careful process and quality control of the wafer thickness and its variation during wafer and solar cell manufacturing requires continuous monitoring of thickness by the supplier of wafers for PV applications as well as by the user of such wafers.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003eTherefore a standardized test method providing reproducible data for thickness and its variation is required to establish agreement between business partners regarding the specification of wafers.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003eThe present Document defines a noncontact, high throughput in-line method for measuring wafer thickness and its total variation using capacitive probes.\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"arial\"\u003eSEMI E89 — Guide for Measurement System Analysis (MSA)\u003cbr\u003e SEMI M59 — Terminology for Silicon Technology\u003cbr\u003e SEMI MF1569 — Guide for Generation of Consensus Reference Materials for Semiconductor Technology\u003cbr\u003e SEMI\u003ci\u003e \u003c\/i\u003ePV22 —Specification for Silicon Wafers for Use as Photovoltaic Solar Cells\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI PV41-0912 (Reapproved 0419) - Current","offer_id":40234318528579,"sku":"8824","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI PV41-0912 - Superseded","offer_id":40234318561347,"sku":"5281","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVVolume_83d21612-ebb1-4e92-b28c-4ba46fc5e8d0.png?v=1776702451","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/pv04100-semi-pv41-test-method-for-in-line-noncontact-measurement-of-thickness-and-thickness-variation-of-silicon-wafers-for-pv-applications-using-capacitive-probes","provider":"SEMI Dev 2","version":"1.0","type":"link"}