{"product_id":"pv04000-semi-pv40-test-method-for-in-line-measurement-of-saw-marks-on-pv-silicon-wafers-by-a-light-sectioning-technique-using-multiple-line-segments","title":"PV04000 - SEMI PV40 - Test Method for In-Line Measurement of Saw Marks on PV Silicon Wafers by a Light Sectioning Technique Using Multiple Line Segments","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSilicon (Si) wafers for PV applications cut from a Si ingot or Si brick contain a variety of micro- and macroscopic crystallographic defects and flaws that may impact the efficiency of a solar cells or the yield of a manufacturing line.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eTheses defects can be categorized by their origin, either as grown-in defects that are generated during the solidification of the Si ingot or as process induced defects that are generated by abrasive processes during manufacturing of the wafers.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe grown-in defects consist of point defects (impurities, vacancies, self-interstitials and their complexes), dislocations, grain boundaries, and precipitates\/inclusions.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe process induced defects consist of chips\/indents (surface and edge) and cracks (not to mention the surface itself).\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eInclusions, chips and cracks are detrimental for solar cell processing as they may enhance stress in the wafer bulk and the region surrounding them and trigger the breakage of a wafer.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eCharacteristic parameters of these defects are part of wafer specifications (SEMI PV22), such as number per wafer, maximum length or size. Standardized test methods for measuring them are required to avoid disagreement between business partners regarding wafer quality and specification.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Standard defines a test method for reproducibly detecting and characterizing cracks and distinguishing them from other defects.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Test Method characterizes cracks in single or multicrystalline Si wafers.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eIt covers an in-line, noncontacting and nondestructive method that determines the number of cracks per wafer and crack length of clean, dry as-cut Si wafers that are supported by two belts that move the test specimen through the measurement equipment.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Test Method covers square and pseudo-square PV Si wafers, with a nominal edge length ≥125 mm and a thickness ≥100 µm.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eBecause this Test Method is intended for in-line high throughput measurements it is mandatory to operate the measurement system under a tight SPC (e.g., ISO 11462) for obtaining reliable, repeatable and reproducible measurement data.\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI E89 –– Guide for Measurement System Analysis (MSA)\u003cbr\u003e SEMI M59 –– Terminology for Silicon Technology\u003cbr\u003e SEMI MF1569 –– Guide for Generation of Consensus Reference Materials for Semiconductor Technology\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI PV40-0513 - Current","offer_id":40234317316163,"sku":"5280","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI PV40-0912 - Superseded","offer_id":40234317414467,"sku":"12778","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVVolume_a61a95c2-e92c-4c18-9dee-fe90d7a0ba94.png?v=1776702452","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/pv04000-semi-pv40-test-method-for-in-line-measurement-of-saw-marks-on-pv-silicon-wafers-by-a-light-sectioning-technique-using-multiple-line-segments","provider":"SEMI Dev 2","version":"1.0","type":"link"}