{"product_id":"p04000-semi-p40-specification-for-mounting-requirements-for-extreme-ultraviolet-lithography-masks","title":"P04000 - SEMI P40 - Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Specification covers the mounting requirements for extreme\nultraviolet lithography (EUVL) masks in select tools.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Standard details the requirements for EUVL mask\nmounting. The mask mount is a flat reference surface against which the mask is\nclamped. The specific design and material of the mask mount are not specified.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003ca name=\"_Ref211132072\"\u003e\u003c\/a\u003e\u003ca name=\"_Ref12839249\"\u003e\u003cspan style=\"mso-bookmark:_Ref211132072\"\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/a\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"mso-bookmark:_Ref12839249\"\u003e\u003cspan style=\"mso-bookmark:_Ref211132072\"\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003eThe mounting requirements in this Standard\napply to the EUV exposure tool\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"mso-bookmark:\n_Ref211132072\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003es.\nThese mounting requirements may be used in other tools used to fabricate or\nmeasure EUV masks.\u003c\/span\u003e\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;\nfont-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P37 — Specification for Extreme Ultraviolet\nLithography Masks Substrates\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P40-1109 (Reapproved 1221)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P40-1109 (Reapproved 0416)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P40-1109 (complete rewrite)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P40-1103 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P40-1109 (Reapproved 1221) - Current","offer_id":40234324820035,"sku":"14823","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P40-1109 (Reapproved 0416) - Superseded","offer_id":40234324951107,"sku":"5237","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P40-1109 - Superseded","offer_id":40234325049411,"sku":"12986","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P40-1103 - Superseded","offer_id":40234325082179,"sku":"12985","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_9a0d6d53-547c-4c4a-abb5-4fb4f5164541.png?v=1776702499","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p04000-semi-p40-specification-for-mounting-requirements-for-extreme-ultraviolet-lithography-masks","provider":"SEMI Dev 2","version":"1.0","type":"link"}