{"product_id":"p03700-semi-p37-極紫外線リソグラフィマスク基板の仕様","title":"P03700 - SEMI P37 - 極紫外線リソグラフィマスク基板の仕様","description":"\u003cp class=\"SubtitleIndent\" style=\"MARGIN: 0pt 36pt 6pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，\u003cspan style=\"FONT-SIZE: 10pt\"\u003eGlobal \u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003eMicropatterning \u003cspan style=\"FONT-SIZE: 10pt\"\u003eCommittee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されたもので，\u003cspan style=\"FONT-SIZE: 10pt\"\u003eNorth American \u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003eMicropatterning\u003cspan style=\"FONT-SIZE: 10pt\"\u003e Committee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eが直接責任を負うものである。現版は，\u003cspan style=\"FONT-SIZE: 10pt\"\u003e200\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e8\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e29\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日\u003cspan style=\"FONT-SIZE: 10pt\"\u003e North American Regional Standards Committee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eに承認され\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eた\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e。\u003cspan style=\"FONT-SIZE: 10pt\"\u003e200\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e9\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月にまず\u003cspan style=\"FONT-SIZE: 10pt\"\u003ewww.semi.org\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eとなり\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt\"\u003e200\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e11\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行に至る。\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e初版は\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2001\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月。\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本仕様は，極紫外線リソグラフィ（\u003cspan style=\"mso-fareast-language: JA\"\u003eEUVL\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e）マスク用の基板に関する一般的要求条件を記述している。\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P37-1102 - Superseded","offer_id":40234368499779,"sku":"12978","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_f5d178af-e1a4-4960-94d4-0b63393f60c1.png?v=1776701863","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p03700-semi-p37-%e6%a5%b5%e7%b4%ab%e5%a4%96%e7%b7%9a%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%9e%e3%82%b9%e3%82%af%e5%9f%ba%e6%9d%bf%e3%81%ae%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}