{"product_id":"p03500-semi-p35-マイクロリソグラフィメトロロジの用語法","title":"P03500 - SEMI P35 - マイクロリソグラフィメトロロジの用語法","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0pt 21pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，\u003cspan style=\"FONT-SIZE: 10pt\"\u003eglobal Micropatterning Committee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は\u003cspan style=\"FONT-SIZE: 10pt\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで\u003cspan style=\"FONT-SIZE: 10pt\"\u003e2006\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e8\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt\"\u003e24\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日に発行が承認された。\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2006\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e10\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003ewww.semi.org\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで，\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e \u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eそして\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2006\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003eCD-ROM\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能となる。初版は\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2000\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行，前版は\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2004\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e7\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行された。\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt\"\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cfont size=\"2\"\u003e明確で普遍的に受入れられる定義が，メトロロジ機器の買手と売手の間で効果的に意思を疎通し誤解を防ぐために必要となる。本書の目的は，マイクロリソグラフィで重要なメトロロジに関する問題を理解し論議するために，一貫性のある用語を提供することである。\u003cspan style=\"LAYOUT-GRID-MODE: line; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E89 — Guide for Measurement System Analysis (MSA) \u003cbr\u003e \u003cfont\u003eSEMI P28 — Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P35-1106 - Superseded","offer_id":40234368892995,"sku":"12971","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_fd0ace3b-319d-4cb4-85f0-ce3d43f89020.png?v=1776701865","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p03500-semi-p35-%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%a1%e3%83%88%e3%83%ad%e3%83%ad%e3%82%b8%e3%81%ae%e7%94%a8%e8%aa%9e%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}