{"product_id":"p03100-semi-p31-化学増幅型caフォトレジストパラメータのカタログ発行の作業方法","title":"P03100 - SEMI P31 - 化学増幅型（CA）フォトレジストパラメータのカタログ発行の作業方法","description":"\u003cp class=\"SubtitleIndent\" style=\"MARGIN: 0pt 36pt 6pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本作業方法は，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003eGlobal Micropatterning Committee\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで技術的に承認されたもので，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003eJapanese\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e Micropatterning Committee\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eが直接責任を負うものである。現版は，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e2004\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e1\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e9\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e日\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003eJapanese Regional Standards Committee\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにて承認されている。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e2004\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e2\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月にまず\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003ewww.semi.org\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能になり，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e2004\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行に至る。初版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e1997\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e9\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本文書の目的は，化学増幅型（\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eCA\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e：\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e chemical amplified\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e）フォトレジストパラメータ発行のベースラインを提供することである。\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P31-0304 - Superseded","offer_id":40234372268099,"sku":"12967","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_aeeb24f1-db3c-4cb2-ba4b-892a41d6406d.png?v=1776701865","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p03100-semi-p31-%e5%8c%96%e5%ad%a6%e5%a2%97%e5%b9%85%e5%9e%8bca%e3%83%95%e3%82%a9%e3%83%88%e3%83%ac%e3%82%b8%e3%82%b9%e3%83%88%e3%83%91%e3%83%a9%e3%83%a1%e3%83%bc%e3%82%bf%e3%81%ae%e3%82%ab%e3%82%bf%e3%83%ad%e3%82%b0%e7%99%ba%e8%a1%8c%e3%81%ae%e4%bd%9c%e6%a5%ad%e6%96%b9%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}