{"product_id":"p02900-semi-p29-減衰型位相シフトマスクハーフトーン型位相シフトマスクおよびマスクブランクスに特有な特性の仕様","title":"P02900 - SEMI P29 - 減衰型位相シフトマスク（ハーフトーン型位相シフトマスク）およびマスクブランクスに特有な特性の仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0pt 21pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本仕様は，\u003cspan style=\"FONT-SIZE: 10pt\"\u003eglobal Micropatterning Committee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は\u003cspan style=\"FONT-SIZE: 10pt\"\u003e2005\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e9\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt\"\u003e8\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日，\u003cspan style=\"FONT-SIZE: 10pt\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eにて発行が承認された。\u003cspan style=\"FONT-SIZE: 10pt\"\u003e2005\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e10\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt\"\u003ewww.semi.org\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで，そして\u003cspan style=\"FONT-SIZE: 10pt\"\u003e2005\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt\"\u003e11\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt\"\u003eCD-ROM\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e初版は\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e1997\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e9\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行された。\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan\u003e注意：　本文書は\u003cspan style=\"mso-fareast-language: JA\"\u003e2005\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年，全面的に改訂された。\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本仕様は，減衰型位相シフトマスク（ハーフトーン型位相シフトマスク\u003cspan lang=\"JA\" style=\"mso-fareast-language: JA\"\u003e \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e；\u003cspan lang=\"JA\" style=\"mso-fareast-language: JA\"\u003e \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e以下省略）およびマスクブランクスに特有な特性について記載する。\u003cspan style=\"mso-fareast-language: JA\"\u003e \u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI P1 — Specification for Hard Surface Photomask Substrates\u003cbr\u003eSEMI P22 — Guideline for Photomask Defect Classification and Size Definition \u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P29-1105 - Superseded","offer_id":40234372399171,"sku":"12964","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_2c07cca0-53f5-4a59-8c0b-b0f112f958f9.png?v=1776701866","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p02900-semi-p29-%e6%b8%9b%e8%a1%b0%e5%9e%8b%e4%bd%8d%e7%9b%b8%e3%82%b7%e3%83%95%e3%83%88%e3%83%9e%e3%82%b9%e3%82%af%e3%83%8f%e3%83%bc%e3%83%95%e3%83%88%e3%83%bc%e3%83%b3%e5%9e%8b%e4%bd%8d%e7%9b%b8%e3%82%b7%e3%83%95%e3%83%88%e3%83%9e%e3%82%b9%e3%82%af%e3%81%8a%e3%82%88%e3%81%b3%e3%83%9e%e3%82%b9%e3%82%af%e3%83%96%e3%83%a9%e3%83%b3%e3%82%af%e3%82%b9%e3%81%ab%e7%89%b9%e6%9c%89%e3%81%aa%e7%89%b9%e6%80%a7%e3%81%ae%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}