{"product_id":"p02600-semi-p26-parameter-checklist-for-photoresist-sensitivity-measurement","title":"P02600 - SEMI P26 - Parameter Checklist for Photoresist Sensitivity Measurement","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www.semi.org June 2003; to be published July 2003. Originally published in 1996.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis checklist identifies the parameters for the measurement of photoresist sensitivity in order to avoid the variations between the supplier and users of photoresist.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe resists for which this guideline is intended are positive photoresist.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eIn discussions between the supplier and the user of the resists, quantitative values should be provided for each parameter.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI P27 — Parameter Checklist for Resist Thickness Measurement on a Substrate\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P26-0703 - Inactive","offer_id":40234356441155,"sku":"11321","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_aa032667-a51a-4193-8ba1-c8a3bfa3a254.png?v=1776701965","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p02600-semi-p26-parameter-checklist-for-photoresist-sensitivity-measurement","provider":"SEMI Dev 2","version":"1.0","type":"link"}