{"product_id":"p01200-semi-p12-determination-of-iron-zinc-calcium-magnesium-copper-boron-aluminum-chromium-manganese-and-nickel-in-positive-photoresists-by-inductively-coupled-plasma-emission-spectroscopy-icp","title":"P01200 - SEMI P12 - Determination of Iron, Zinc, Calcium, Magnesium, Copper, Boron, Aluminum, Chromium, Manganese, and Nickel in Positive Photoresists by Inductively Coupled Plasma Emission Spectroscopy (ICP)","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eThis procedure is an ICP plasma emission analysis for determination of iron, zinc, calcium, magnesium, copper, boron, aluminum, chromium, manganese, and nickel in photoresist. The applicable concentration range is 0.1 to 1 ppm when the sample is diluted 1 to 4. The precision was found to be within 0.1 ppm in a round robin analysis between four laboratories.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P12-0997 - Inactive","offer_id":40234360635459,"sku":"11293","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_24b3bace-08ea-4285-9a82-1c2d9ec74cc0.png?v=1776701987","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p01200-semi-p12-determination-of-iron-zinc-calcium-magnesium-copper-boron-aluminum-chromium-manganese-and-nickel-in-positive-photoresists-by-inductively-coupled-plasma-emission-spectroscopy-icp","provider":"SEMI Dev 2","version":"1.0","type":"link"}