{"product_id":"p00500-semi-p5-specification-for-pellicles","title":"P00500 - SEMI P5 - Specification for Pellicles","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003c!--[if gte vml 1]\u003e\u003cv:line id=\"Straight_x0020_Connector_x0020_3\" style=\"position:absolute;z-index:251659264;visibility:visible;\n mso-wrap-style:square;mso-wrap-distance-left:9pt;mso-wrap-distance-top:0;\n mso-wrap-distance-right:9pt;mso-wrap-distance-bottom:0;\n mso-position-horizontal:absolute;mso-position-horizontal-relative:text;\n mso-position-vertical:absolute;mso-position-vertical-relative:text\" from=\"-11pt,3.9pt\" to=\"-11pt,3.9pt\" strokecolor=\"#4472c4 [3204]\" strokeweight=\".5pt\" o:spid=\"_x0000_s1026\" 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\u003cv:stroke joinstyle=\"miter\"\u003e\u003c\/v:stroke\u003e\n\u003c\/v:line\u003e\u003c![endif]--\u003e\u003c!--[if !vml]--\u003e\u003cspan style=\"mso-ignore:vglayout;position:\nabsolute;z-index:251659264;margin-left:-16px;margin-top:4px;width:2px;\nheight:2px\"\u003e\u003cimg width=\"2\" height=\"2\" src=\"file:\/\/\/C:\/Users\/saustin\/AppData\/Local\/Temp\/msohtmlclip1\/01\/clip_image001.png\" v:shapes=\"Straight_x0020_Connector_x0020_3\"\u003e\u003c\/span\u003e\u003c!--[endif]--\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eThis\nSpecification covers the general requirements for pellicles used on photomasks\nor reticles in photolithographic exposure systems.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Specification covers pellicles for use in either\nbroadband, polychromatic or monochromatic exposure systems.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eNone.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-0416 (Reapproved 1221)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-0416 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-0704 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-94 (Reapproved 1103)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-94 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-92 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI P5-86 (first published)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI P5-0416 (Reapproved 1221) - Current","offer_id":40234314891331,"sku":"14820","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P5-0416 - Superseded","offer_id":40234314956867,"sku":"5241","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P5-0704 - Superseded","offer_id":40234314989635,"sku":"13004","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_9b7628df-0a07-414e-9740-11d2d88bc088.png?v=1776702496","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p00500-semi-p5-specification-for-pellicles","provider":"SEMI Dev 2","version":"1.0","type":"link"}