{"product_id":"p00100-semi-p1-specification-for-hard-surface-photomask-substrates","title":"P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/font\u003e\u003c\/p\u003e\u003cspan lang=\"EN\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNOTICE: This Document was completely rewritten in 2008.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Specification covers the general requirements of the glass substrate for hard surface photomasks.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Document covers square photomasks up to 7 inches in length.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Document also gives specifications for the following materials:\u003c\/font\u003e\u003c\/p\u003e \u003cul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003eHigh Thermal Expansion (HTE),\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003eMedium Thermal Expansion (MTE),\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003eLow Thermal Expansion (LTE),\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSynthetic Fused Silica (SFS),\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003eDurable Synthetic Fused Silica (DSFS) glass for 193 nm wavelength.\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI P1-0708E - Inactive","offer_id":40234364043331,"sku":"11289","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P1-0708 - Superseded","offer_id":40234364108867,"sku":"12945","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P1-1101 - Superseded","offer_id":40234364141635,"sku":"12951","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P1-92 (Reapproved 0299)E - Superseded","offer_id":40234364174403,"sku":"12956","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P1-92 (Reapproved 0299) - Superseded","offer_id":40234364207171,"sku":"12955","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI P1-92 - Superseded","offer_id":40234364239939,"sku":"12954","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/PVolume_d2df5b2e-b149-4406-a3e8-4407d64a4f29.png?v=1776701990","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/p00100-semi-p1-specification-for-hard-surface-photomask-substrates","provider":"SEMI Dev 2","version":"1.0","type":"link"}