{"product_id":"ms00600-semi-ms6-guide-for-design-and-materials-for-interfacing-microfluidic-systems","title":"MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems","description":"\u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eThis standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on December 20, 2007. It was available at www.semi.org in February 2008. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eThis document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. \u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies\u003cbr\u003eSEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components\u003cbr\u003eSEMI F79 — Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components \u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MS6-0308 - Inactive","offer_id":40234362536003,"sku":"8704","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MSVolume_0bf62961-3cf7-425f-a880-418138501924.png?v=1776702076","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/ms00600-semi-ms6-guide-for-design-and-materials-for-interfacing-microfluidic-systems","provider":"SEMI Dev 2","version":"1.0","type":"link"}