{"product_id":"ms00200-semi-ms2-test-method-for-step-height-measurements-of-thin-films","title":"MS00200 - SEMI MS2 - Test Method for Step Height Measurements of Thin Films","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Test Method enables the determination of step height measurements of thin films. Step height measurements can be used to determine thin film thickness values. Thickness measurements  are an aid in the design and fabrication of MEMS devices and can be used to obtain thin film material parameters, such as Young’s modulus. \u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Test Method presents a procedure for measuring step heights of thin films using step height test structures. It applies only to films, such as those found in microelectromechanical system (MEMS) materials, which can be accurately imaged using an optical interferometer (also called an interferometric microscope) or comparable instrument with the capability of obtaining topographical 2D data traces.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI MS4 — Test Method for Young’s Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MS2-1113 (Reapproved 1125)\u003cbr\u003eSEMI MS2-1113 (Reapproved 0819)\u003cbr\u003eSEMI MS2-1113 (technical revision)\u003cbr\u003eSEMI MS2-0212 (technical revision)\u003cbr\u003eSEMI MS2-1109 (complete rewrite)\u003cbr\u003eSEMI MS2-0307 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MS2-1113 (Reapproved 1125) - Current","offer_id":43106871050307,"sku":"18821","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS2-1113 (Reapproved 0819) - Superseded","offer_id":43106871083075,"sku":"13474","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS2-1113 - Superseded","offer_id":40234353524803,"sku":"8492","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS2-0212 - Superseded","offer_id":40234353557571,"sku":"8693","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS2-1109 - Superseded","offer_id":40234353590339,"sku":"8695","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS2-0307 - Superseded","offer_id":40234353623107,"sku":"8694","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MSVolume_160efef6-c215-4e58-9fc7-2462f201f90e.png?v=1776702081","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/ms00200-semi-ms2-test-method-for-step-height-measurements-of-thin-films","provider":"SEMI Dev 2","version":"1.0","type":"link"}