{"product_id":"ms00100-semi-ms1-guide-to-specifying-wafer-wafer-bonding-alignment-targets","title":"MS00100 - SEMI MS1 - Guide to Specifying Wafer-Wafer Bonding Alignment Targets","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Guide provides a framework for specifying the dimensions, location, quantity and characteristics of alignment targets that are placed on each wafer of a pair of wafers. Such targets are used to align two patterned wafers prior to an operation that bonds them together.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide applies to targets that can be used with two common alignment processes—inner surface alignment and outer surface alignment.\u003cbr\u003e2.2  This Guide covers specification requirements, mark characteristics and applications.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MS1-0307 (Reapproved 0525)\u003cbr\u003eSEMI MS1-0307 (Reapproved 0318)\u003cbr\u003eSEMI MS1-0307 (Reapproved 0812)\u003cbr\u003eSEMI MS1-0307 (technical revision)\u003cbr\u003eSEMI MS1-0306 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MS1-0307 (Reapproved 0525) - Current","offer_id":43106871181379,"sku":"18506","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS1-0307 (Reapproved 0318) - Superseded","offer_id":43106871214147,"sku":"8490","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS1-0307 (Reapproved 0812) - Superseded","offer_id":40234339827779,"sku":"8692","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS1-0307 - Superseded","offer_id":40234339860547,"sku":"8691","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MS1-0306 - Superseded","offer_id":40234339958851,"sku":"8690","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MSVolume.png?v=1776702082","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/ms00100-semi-ms1-guide-to-specifying-wafer-wafer-bonding-alignment-targets","provider":"SEMI Dev 2","version":"1.0","type":"link"}