{"product_id":"mf181100-semi-mf1811-guide-for-estimating-the-power-spectral-density-function-and-related-finish-parameters-from-surface-profile-data","title":"MF181100 - SEMI MF1811 - Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThere is some confusion in the roughness-measurement\ncommunity concerning the use of estimators and the calculation of power\nspectral densities (PSDs) from discrete data sets. Use of this Guide can eliminate\nthese differences and result in the use of consistent units for the PSD and\nrelated parameters. It also provides a uniform reporting procedure for digital\nroughness data that can facilitate communication between different workers and\ndifferent laboratories.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Guide defines the methodology for calculating a set of\ncommonly used statistical parameters and functions of surface roughness from a\nset of measured surface profile data. Its purposes are to provide fundamental\nprocedures and notation for processing and presenting data, to alert the reader\nto related issues that may arise in user-specific applications, and to provide\nliterature references where further details can be found.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Guide is limited to the analysis of one-dimensional or\nprofile data taken at uniform intervals along straight lines across the surface\nunder test, although reference is made to the more general case of\ntwo-dimensional measurements made over a rectangular array of data points.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe data analysis procedures described in this Guide are\ngeneric and are not limited to specific surfaces, surface-generation\ntechniques, degrees of roughness, or measuring techniques. Examples of\nmeasuring techniques that can be used to generate profile data for analysis are\nmechanical profiling instruments using a rigid contacting probe, optical\nprofiling instruments that sample over a line or an array over an area of the\nsurface, optical interferometry, and scanning-microscopy techniques such as\natomic-force microscopy. The distinctions between different measuring\ntechniques enter this Guide through various parameters and functions that are\ndefined in §§ \u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cspan style=\"mso-element:field-begin\"\u003e\u003c\/span\u003e\nREF\u003cspan style=\"mso-spacerun:yes\"\u003e  \u003c\/span\u003e_Ref54513167 \\h \\r \\t\u003cspan style=\"mso-spacerun:yes\"\u003e  \u003c\/span\u003e\\* MERGEFORMAT \u003cspan style=\"mso-element:field-separator\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e4\u003c!--[if gte mso 9]\u003e\u003cxml\u003e\n \u003cw:data\u003e08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000D0000005F00520065006600350034003500310033003100360037000000\u003c\/w:data\u003e\n\u003c\/xml\u003e\u003c![endif]--\u003e\u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cspan style=\"mso-element:field-end\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e and \u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cspan style=\"mso-element:field-begin\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-spacerun:yes\"\u003e \u003c\/span\u003eREF\u003cspan style=\"mso-spacerun:yes\"\u003e \n\u003c\/span\u003e_Ref54513191 \\h \\r \\t\u003cspan style=\"mso-spacerun:yes\"\u003e  \u003c\/span\u003e\\*\nMERGEFORMAT \u003cspan style=\"mso-element:field-separator\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e5\u003c!--[if gte mso 9]\u003e\u003cxml\u003e\n \u003cw:data\u003e08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000D0000005F00520065006600350034003500310033003100390031000000\u003c\/w:data\u003e\n\u003c\/xml\u003e\u003c![endif]--\u003e\u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cspan style=\"mso-element:field-end\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e, such\nas their sampling intervals, bandwidths, and measurement transfer functions.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI M59 — Terminology for Silicon Technology\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI ME1392 — Guide for Angle Resolved Optical Scatter\nMeasurements on Specular or Diffuse Surfaces\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-1116 (Reapproved 1121)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-1116 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-0116 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-0310 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-1109 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-0309 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI MF1811-0704 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan 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