{"product_id":"mf138800-semi-mf1388-test-method-for-generation-lifetime-and-generation-velocity-of-silicon-material-by-capacitance-time-measurements-of-metal-oxide-silicon-mos-capacitors","title":"MF138800 - SEMI MF1388 - Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method covers the measurement of generation lifetime and generation velocity of silicon wafers.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe measurement requires the fabrication of a guard-ring MOS capacitor (refer to Figure 1). This Test Method is therefore destructive to the silicon wafer.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThis test may also be applied to semiconductor materials other than silicon and to insulators other than silicon dioxide, but the details of capacitor fabrication and the analyses and interpretation of data in such cases are not given in this Test Method.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eBoth p- and n-type silicon in the dopant density range from 1013 cm3 to 1017 cm3 can be evaluated by this Test Method. The approximate range of generation lifetime that can be measured is 1 µs to 10 ms.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe Test Method is applicable to both bulk and epitaxial silicon. If epitaxial silicon is used, the epitaxial layer must be of the same conductivity type as the substrate and should be at least twice as thick as the maximum depletion width in deep depletion to avoid errors caused by the proximity of the epitaxial interface (refer to ¶ 12.4).\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eIt is necessary to complete the measurements described in SEMI MF1153 before performing the measurements described in this Test Method to determine the values of maximum capacitance, equilibrium minimum capacitance, and dopant density.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eA digital computer capable of controlling the instruments and recording data is required and significantly simplifies and improves the accuracy of the data acquisition and analysis process.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MF1388-0707 (Reapproved 1023)\u003cbr\u003eSEMI MF1388-0707 (Reapproved 0718)\u003cbr\u003eSEMI MF1388-0707 (Reapproved 0412)\u003cbr\u003eSEMI MF1388-0707 (technical revision)\u003cbr\u003eSEMI MF1388-1106 (technical revision)\u003cbr\u003eSEMI MF1388-92 (Reapproved 2000) (first SEMI publication)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MF1388-0707 (Reapproved 1023) - Current","offer_id":43106889728067,"sku":"17222","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1388-0707 (Reapproved 0718) - Superseded","offer_id":43106889760835,"sku":"4924","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1388-0707 (Reapproved 0412) - Superseded","offer_id":40234295885891,"sku":"9820","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1388-0707 - Superseded","offer_id":40234295918659,"sku":"9819","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1388-1106 - Superseded","offer_id":40234295951427,"sku":"9821","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1388-92 (Reapproved 2000) - Superseded","offer_id":40234295984195,"sku":"9822","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MFVolume_0af7093b-280b-4c77-9017-7aefa07f62f8.png?v=1776702563","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/mf138800-semi-mf1388-test-method-for-generation-lifetime-and-generation-velocity-of-silicon-material-by-capacitance-time-measurements-of-metal-oxide-silicon-mos-capacitors","provider":"SEMI Dev 2","version":"1.0","type":"link"}