{"product_id":"mf104800-semi-mf1048-test-method-for-measuring-the-reflective-total-integrated-scatter","title":"MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter","description":"\u003cp\u003e\u003cbr\u003eThis Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to bandwidth limited values of the rms microroughness of the surface.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method can be extended to measurements of TIS on other types of surfaces, but in this case, it is not possible to determine the rms microroughness from the measured TIS.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method is applicable to specimens ranging in size from 5 mm in diameter to as large as the supporting components can accommodate. The sampling area is typically 1 mm to 5 mm in diameter.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method is limited to specimens with optical surfaces that are flat or that are spherical with a radius of curvature greater than 10 m.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method determines the integrated scattering from an angle within 3° from the direction of specular reflection to an angle greater than 45° from the surface normal.\u003c\/p\u003e\u003cp\u003eThe Test Method is generally performed with a laser light source.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method includes procedures for establishing the repeatability of the test equipment under the conditions of measurement.\u003cbr\u003eRepeated use of this Test Method on different areas of the specimen permits mapping of the surface TIS and computed rms microroughness.\u003c\/p\u003e\u003cp\u003eThis Test Method is nondestructive.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe maintenance of a control chart to monitor the long-term stability of the measurement process is required. This should be carried out by procedures normally in place in the testing organization. For organizations without such procedures, a suggested method for doing this is discussed in Related Information 1.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MF1048-0217 (Reapproved 1023)\u003cbr\u003eSEMI MF1048-0217 (technical revision)\u003cbr\u003eSEMI MF1048-1111 (technical revision)\u003cbr\u003eSEMI MF1048-1109 (technical revision)\u003cbr\u003eSEMI MF1048-1105 (technical revision)\u003cbr\u003eSEMI MF1048-87 (Reapproved 1999) (first SEMI publication)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MF1048-0217 (Reapproved 1023) - Current","offer_id":43106890547267,"sku":"17175","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1048-0217 - Superseded","offer_id":43106890580035,"sku":"4916","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1048-1111 - Superseded","offer_id":40234289823811,"sku":"9789","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1048-1109 - Superseded","offer_id":40234289987651,"sku":"9788","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1048-1105 - Superseded","offer_id":40234290184259,"sku":"9787","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF1048-87 (Reapproved 1999) - Superseded","offer_id":40234290315331,"sku":"9790","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MFVolume_e08189b7-c6de-4a7e-98b5-5f2152b80c55.png?v=1776702569","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/mf104800-semi-mf1048-test-method-for-measuring-the-reflective-total-integrated-scatter","provider":"SEMI Dev 2","version":"1.0","type":"link"}