{"product_id":"mf067200-semi-mf672-guide-for-measuring-resistivity-profiles-perpendicular-to-the-surface-of-a-silicon-wafer-using-a-spreading-resistance-probe","title":"MF067200 - SEMI MF672 - Guide for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Guide covers procedures for measurement of the resistivity profile perpendicular to the surface of a silicon wafer of known orientation and type in any resistivity range for which there exist suitable standards. Polished, lapped, or ground surfaces may be used.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe procedures of this Guide can be used to profile through p-n junctions.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe procedures of this Guide may be used on epitaxial films, substrates, diffused layers, or ion-implanted layers, or any combination of these.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe procedures of this Guide are comparative in that the resistivity profile of an unknown specimen is determined by comparing its measured spreading resistance value with those of calibration standards of known resistivity. These calibration standards must have the same surface preparation, conductivity type, and crystallographic orientation as the unknown specimen.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI C28 — Specification and Guide for Hydrofluoric Acid\u003cbr\u003eSEMI C29 — Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v\/v)\u003cbr\u003eSEMI C31 — Specification for Methanol\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI MF26 — Test Method for Determining the Orientation of a Semiconductive Single Crystal\u003cbr\u003eSEMI MF42 — Test Method for Conductivity Type of Extrinsic Semiconducting Materials\u003cbr\u003eSEMI MF84 —Test Method for Measuring Resistivity of Silicon Wafers with an In-Line Four-Point Probe\u003cbr\u003eSEMI MF374 — Test Method for Sheet Resistance of Silicon Epitaxial, Diffused, Polysilicon, and Ion-Implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure\u003cbr\u003eSEMI MF525 — Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe\u003cbr\u003eSEMI MF674 — Practice for Preparing Silicon for Spreading Resistance Measurements\u003cbr\u003eSEMI MF723 — Practice for Conversion Between Resistivity and Dopant or Carrier Density for Boron-Doped, Phosphorus-Doped, and Arsenic-Doped Silicon\u003cbr\u003eSEMI MF1392 — Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements with a Mercury Probe\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MF672-0412 (Reapproved 1023)\u003cbr\u003eSEMI MF672-0412 (Reapproved 1018)\u003cbr\u003eSEMI MF672-0412 (technical revision)\u003cbr\u003eSEMI MF672-0307 (technical revision)\u003cbr\u003eSEMI MF672-0706 (technical revision)\u003cbr\u003eSEMI MF672-01 (first SEMI publication)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MF672-0412 (Reapproved 1023) - Current","offer_id":43106887991363,"sku":"17193","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF672-0412 (Reapproved 1018) - Superseded","offer_id":43106888024131,"sku":"4964","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF672-0412 - Superseded","offer_id":40234297917507,"sku":"9980","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF672-0307 - Superseded","offer_id":40234298048579,"sku":"9979","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF672-0706 - Superseded","offer_id":40234298081347,"sku":"9981","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF672-01 - Superseded","offer_id":40234297688131,"sku":"9978","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MFVolume_88315bdc-e8c8-462d-8d54-66415f57632b.png?v=1776702515","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/mf067200-semi-mf672-guide-for-measuring-resistivity-profiles-perpendicular-to-the-surface-of-a-silicon-wafer-using-a-spreading-resistance-probe","provider":"SEMI Dev 2","version":"1.0","type":"link"}