{"product_id":"mf052300-semi-mf523-practice-for-unaided-visual-inspection-of-polished-silicon-wafer-surfaces","title":"MF052300 - SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Practice covers an inspection procedure for determining the surface quality of silicon wafers that have been polished on one side.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThis Practice is intended as a large-volume acceptance method and does not require use of a microscope or other optical instruments. The inspection relies heavily on the visual acuity of the operator; therefore, test results may be very operator-sensitive.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eDefects visible to the unaided eye on polished wafer surfaces are categorized in three groups by the illumination geometry that best delineates them: front-surface high-intensity light, front-surface diffuse light and back-surface diffuse light. These defects originate from two sources: (1) imperfections in the silicon crystal, and (2) damage from the manufacturing process, including handling and packaging.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe inspection described generally takes place after polishing and post-polish cleaning but before packaging. Although cleaning and packaging procedures are not a part of this Practice, the inspection may be performed on a packaged product to determine the effect of such procedures on the quality of the polished wafers.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThe values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI C41 — Specification and Guide for 2-Propanol\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI MF154 — Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI MF523-1107 (Reapproved 1023)\u003cbr\u003eSEMI MF523-1107 (Reapproved 0718)\u003cbr\u003eSEMI MF523-1107 (Reapproved 1012)\u003cbr\u003eSEMI MF523-1107 (technical revision)\u003cbr\u003eSEMI MF523-0706 (technical revision)\u003cbr\u003eSEMI MF523-02 (first SEMI publication)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI MF523-1107 (Reapproved 1023) - Current","offer_id":43106888319043,"sku":"17201","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF523-1107 (Reapproved 0718) - Superseded","offer_id":43106888351811,"sku":"4959","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF523-1107 (Reapproved 1012) - Superseded","offer_id":40234302636099,"sku":"9958","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF523-1107 - Superseded","offer_id":40234302799939,"sku":"9957","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF523-0706 - Superseded","offer_id":40234302898243,"sku":"9956","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI MF523-02 - Superseded","offer_id":40234302996547,"sku":"9955","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MFVolume_9d2fe3a0-ca6a-40aa-ab7d-f9f2052c0e5c.png?v=1776702519","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/mf052300-semi-mf523-practice-for-unaided-visual-inspection-of-polished-silicon-wafer-surfaces","provider":"SEMI Dev 2","version":"1.0","type":"link"}