{"product_id":"m08700-semi-m87-test-method-for-contactless-resistivity-measurement-of-semi-insulating-semiconductors","title":"M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe purpose of this Test Method is to specify methods for\nthe contactless measurement of the resistivity of semi-insulating samples and\nwafers.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method covers the determination of the electrical\nresistivity of semi-insulating semiconductors, including GaAs, InP, CdTe,\nCd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 Ω·cm. It\nmay also be used to characterize other materials exhibiting resistivity in this\nrange, including in particular high resistivity silicon.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe procedures described in this Standard measure the time\nconstant \u003c\/span\u003e\u003cspan style=\"font-size:10.0pt;line-height:107%;font-family:\nSymbol;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial;mso-char-type:symbol;mso-symbol-font-family:Symbol\"\u003e\u003cspan style=\"mso-char-type:symbol;mso-symbol-font-family:Symbol\"\u003et\u003c\/span\u003e\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e of a\nnetwork consisting of the resistive sample and the series capacitance of the\nsample and the capacitive sensor. Alternatively, a plate sensor (PS) or ring\nsensor (RS) may be used. The evaluation is based on the observation of the\ntime-dependent charge transfer after application of a voltage step (time domain\n[TD] evaluation described in Appendix 1) or on measuring the frequency response\nof the network (frequency domain [FD] evaluation described in Appendix 2).\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eCommercially available measurement system configurations\noffer the PS combined with TD evaluation and the RS combined with FD and TD\nevaluation. Topographic evaluation of the sample area is available as well as\ntemperature dependent resistivity measurement to evaluate the activation energy\n∆E, needed to normalize measured data to a reference temperature.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method follows the roadmap laid out by SEMI M54\n(GaAs) and SEMI M55 (SiC), identifying resistivity as an essential material\nparameter.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI M54 — Guide for Semi-Insulating (SI) GaAs Material\nParameters\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI M55 — Specification for Polished Monocrystalline\nSilicon Carbide Wafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI M87-0422 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI M87-0116 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M87-0422 - Current","offer_id":40234293002307,"sku":"14998","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M87-0116 - Superseded","offer_id":40234293100611,"sku":"4912","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_545866d2-f9f7-4e07-b4a2-23e91373d244.png?v=1776702573","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m08700-semi-m87-test-method-for-contactless-resistivity-measurement-of-semi-insulating-semiconductors","provider":"SEMI Dev 2","version":"1.0","type":"link"}