{"product_id":"m08400-semi-m84-specification-for-polished-single-crystal-silicon-wafers-for-gallium-nitride-on-silicon-applications","title":"M08400 - SEMI M84 - Specification for Polished Single Crystal Silicon Wafers for Gallium Nitride-On-Silicon Applications","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSingle crystal (monocrystalline) silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. Gallium nitride on single crystal silicon wafers represents emerging markets with applications such as high brightness-light emitting diodes (HB-LED) or high-frequency power devices. At present, the specifications for silicon wafer substrates requested by customers of such wafers differ widely. To permit common processing and metrology equipment to be used in multiple device fabrication lines, it is essential for key wafer properties to be standardized. These Specifications provide the essential dimensions and certain other common characteristics of polished single crystal silicon wafers for gallium nitride-on-silicon applications.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eBecause both applications require the full range of thickness and edge profile specifications, there is no distinction between the two types of applications in these Specifications.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eThese Specifications cover ordering information and certain requirements for high-purity, single crystal polished silicon wafers used for gallium nitride-on-silicon applications.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSpecifications for dimensional characteristics and selected other properties are provided for three types of single crystal polished silicon wafers:\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e150 mm flatted polished single crystal silicon wafers with secondary flat,\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e150 mm flatted polished single crystal silicon wafers without secondary flat, and\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e200 mm notched polished single crystal silicon wafers.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eValues given for thickness, total thickness variation (TTV), bow, and warp apply only to wafers prior to application of back surface films, extrinsic gettering treatments, or other thermal treatments.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eThese Specifications apply specifically to prime silicon wafers with at least one chemical-mechanically polished surface. Ground, lapped, and unpolished wafers are not covered in these specifications but they may provide guidance in connection with their procurement.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M1 — Specification for Polished Single Crystal Silicon Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M12 — Specification for Serial Alphanumeric Marking of the Front Surface of Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M13 — Specification for Alphanumeric Marking of Silicon Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M40 — Guide for Measurement of Surface Roughness of Planar Surfaces on Silicon Wafer\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M59 — Terminology for Silicon Technology\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI T3 — Specification for Wafer Box Labels\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M84-0414E (Reapproved 0923)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M84-0414E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M84-0414 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M84-0414E (Reapproved 0923) - Current","offer_id":43106891071555,"sku":"17152","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M84-0414E - Superseded","offer_id":43106891104323,"sku":"4909","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M84-0414 - Superseded","offer_id":40234297000003,"sku":"9770","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_92cd8423-15cc-4c28-bfff-3f093548967d.png?v=1776702575","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m08400-semi-m84-specification-for-polished-single-crystal-silicon-wafers-for-gallium-nitride-on-silicon-applications","provider":"SEMI Dev 2","version":"1.0","type":"link"}