{"product_id":"m08200-semi-m82-test-method-for-the-carbon-acceptor-concentration-in-semi-insulating-gallium-arsenide-single-crystals-by-infrared-absorption-spectroscopy","title":"M08200 - SEMI M82 - Test Method for the Carbon Acceptor Concentration in Semi-Insulating Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy","description":"\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Test Method covers the determination\nof the carbon content in GaAs using infrared (IR) absorption. The test method\nutilizes the linear relationship between the carbon content and the integrated\nabsorption of the localized vibration of substitutionally bonded carbon (C\u003csub\u003eAs\u003c\/sub\u003e).\nAt a measurement temperature of 300 K (room temperature) this absorption\nband is observed at 580 cm\u003csup\u003e−1\u003c\/sup\u003e, at 77 K between 582 and 583 cm\u003csup\u003e−1\u003c\/sup\u003e.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003co:p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Test Method covers the determination\nof substitutional carbon mainly in SI single crystal GaAs. It may also be used\nfor polycrystalline GaAs and conducting GaAs up to a free carrier concentration\nof about 1 × 10\u003csup\u003e16\u003c\/sup\u003e cm\u003csup\u003e−3\u003c\/sup\u003e.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003co:p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Test Method is applicable for carbon\ncontent between 1 × 10\u003csup\u003e13\u003c\/sup\u003e cm\u003csup\u003e−3\u003c\/sup\u003e and the\nsolubility limit (\u0026gt;1 × 10\u003csup\u003e16\u003c\/sup\u003e cm\u003csup\u003e−3\u003c\/sup\u003e). The lower\nlimit depends on the measurement temperature, the sample geometry and the\nquality of the spectrometer.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003co:p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003e　\u003c\/span\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eMeasurement temperatures of both 300 K and 77 K may be used.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eAdvantages of the 300 K measurement are:\u003c\/font\u003e\u003c\/p\u003e \u003cul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003ethe necessary spectral resolution is 1 cm-1 as compared to 0.1　cm-1 required at 77 K;\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003ecryostat is not necessary.\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eAdvantages of the 77 K measurement are:\u003c\/font\u003e\u003c\/p\u003e \u003cul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003esensitivity is higher (and therefore the detection limit lower);\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003eno reference sample with a low carbon content is necessary;\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\" size=\"2\"\u003ecommercial thin wafers can be measured.\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe chemical carbon content in GaAs may be higher than the substitutional carbon content C\u003csub\u003eAs\u003c\/sub\u003e as measured by this Standard. According to the present knowledge, however, state-of-the-art single crystal GaAs contains C\u003csub\u003eAs\u003c\/sub\u003e only.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe document follows the roadmap laid out by SEMI M54, Guide for Semi-Insulating (SI) GaAs Material Parameters, defining the carbon concentration as an essential material parameter.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI M54 — Guide for Semi-Insulating (SI) GaAs Material Parameters\u003cbr\u003e SEMI M64 — Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI M82-0820 - Current","offer_id":40234281926723,"sku":"14188","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M82-0813 - Superseded","offer_id":40234281992259,"sku":"4907","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M82-0712 - Superseded","offer_id":40234282057795,"sku":"9768","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_e5ffd2b6-b05a-453d-b38a-b9b6f402f695.png?v=1776702576","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m08200-semi-m82-test-method-for-the-carbon-acceptor-concentration-in-semi-insulating-gallium-arsenide-single-crystals-by-infrared-absorption-spectroscopy","provider":"SEMI Dev 2","version":"1.0","type":"link"}