{"product_id":"m07100-semi-m71-cmos-lsi用シリコン-オン-インシュレーターsoiウェーハのための仕様","title":"M07100 - SEMI M71 - CMOS LSI用シリコン・オン・インシュレーター（SOI）ウェーハのための仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，global Silicon Wafer Committee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は2010\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年1\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月20\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日，global Audits and Reviews Subcommittee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eにて発行が承認された。2010\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年2\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月にwww.semi.org\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。初版は2007\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年11\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に発行された。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003c!--?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/--\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cfont size=\"2\"\u003e \u003ch2 style=\"MARGIN: auto 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e本仕様は，\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e \u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eCMOS\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e大規模集積回路（\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eLSI\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e：\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e large scale integrated circuit\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e）\u003cspan style=\"COLOR: black\"\u003eデバイス用の薄膜シリコン・オン・インシュレーター（\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eSOI\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e：\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e silicon-on-insulator\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e）ウェーハの要求条件を規定するものである。本仕様は，\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e130nm\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e技術ノード以降（\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e65nm\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e45nm\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e等）の\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eLSI\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e用\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e200mm\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eおよび\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e300mm\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eウェーハを対象としている。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e150mm\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eウェーハの場合には，旧来の\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eLSI\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e世代も含まれる。パラメータ，検査手順および受入基準を規定することにより，サプライヤと顧客双方が，製品の特性および品質要求条件を一貫して定義するのがよい。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI M1 — Specifications for Polished Single Crystal Silicon Wafers \u003cbr\u003e \u003cfont\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System \u003cbr\u003e \u003cfont\u003eSEMI M35 — Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI M71-0310 - Superseded","offer_id":40234297196611,"sku":"4895","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_9e540aaf-7b3f-4cab-b77b-6c3d93a179ba.png?v=1776702585","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m07100-semi-m71-cmos-lsi%e7%94%a8%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3-%e3%82%aa%e3%83%b3-%e3%82%a4%e3%83%b3%e3%82%b7%e3%83%a5%e3%83%ac%e3%83%bc%e3%82%bf%e3%83%bcsoi%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e3%81%ae%e3%81%9f%e3%82%81%e3%81%ae%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}