{"product_id":"m06700-semi-m67-測定した厚さデータ配列からesfqr-esfqd-esbir-metrics法を使ってウェーハのエッジ近傍形状を決定するための作業方法","title":"M06700 - SEMI M67 - 測定した厚さデータ配列からESFQR，ESFQD，ESBIR METRICS法を使ってウェーハのエッジ近傍形状を決定するための作業方法","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，\u003cspan style=\"COLOR: black\"\u003eglobal Silicon Wafer Committee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は\u003cspan style=\"COLOR: black; mso-bidi-font-size: 9.0pt\"\u003e2009\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003e年\u003cspan style=\"COLOR: black; mso-bidi-font-size: 9.0pt\"\u003e9\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003e月\u003cspan style=\"COLOR: black; mso-bidi-font-size: 9.0pt\"\u003e4\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003e日，\u003cspan style=\"COLOR: black; mso-bidi-font-size: 9.0pt\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003eにて発行が承認された。\u003cspan style=\"COLOR: black\"\u003e2009\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e10\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"COLOR: black\"\u003ewww.semi.org\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで，そして\u003cspan style=\"COLOR: black\"\u003e2009\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e11\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"COLOR: black\"\u003eCD-ROM\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e初版は\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2006\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行，前版は\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2008\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行された。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PGothic'; COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eウェーハエッジ近傍形状は半導体素子工程の歩留に大きく影響する。\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eエッジ近傍の幾何学的特性情報は製造者や消費者がウェーハの寸法特性が与えられた幾何学的要求を満たしているかどうか決定することを手助けできる。\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eこの作業法は半導体素子工程で使われるウェーハのエッジ近傍形状の平坦性状況を定量化するのに適している。\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eESFQR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eESFQD\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eまたは\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eESBIR metric\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e法は\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eSFQR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eSFQD\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eまたは\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eSBIR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eのような従来法よりもエッジ近傍形状の平坦性状況を定量化するのに更に適している。\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eESFQR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eESFQD\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eESBIR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eは故意に除外された領域を除くウェーハエッジ上のすべての角度位置で充分にかつ矛盾なくエッジ近傍形状を定量化する。一方，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eSFQR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eSFQD\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，は異なる角度位置で異なった処理をし，多くの場合はウェーハエッジの全領域をカバーしていない。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eエッジ近傍形状評価法は，材料購入仕様に使うよりむしろ，プロセスを管理するツールとして使うことに留意すべきである。\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-ALIGN: justify; MARGIN: 3pt 0in; TEXT-JUSTIFY: inter-ideograph; tab-stops: 35.0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e他にもエッジ近傍形状評価法があり，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eZDD\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e ROA\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e PSFQR\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; FONT-WEIGHT: normal; COLOR: black; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eのような他の概念を定量化するものもある。\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; COLOR: black; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers\u003cbr\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI M68 — Practice for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD\u003cbr\u003eSEMI M69 (Preliminary) — Practice for Determining Wafer Near-Edge Geometry Using Roll-Off Amount, ROA\u003cbr\u003eSEMI M70 — Practice for Determining Wafer-Near-Edge Geometry Using Partial Wafer Site Flatness\u003cbr\u003eSEMI MF1530 — Test Method for Measuring Flatness, Thickness, and Total Thickness Variation on Silicon Wafers by Automated Non-Contact Scanning \u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M67-1109 - Superseded","offer_id":40234357882947,"sku":"9725","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_48a77d3c-6df2-46c5-b812-de90bf305744.png?v=1776702033","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m06700-semi-m67-%e6%b8%ac%e5%ae%9a%e3%81%97%e3%81%9f%e5%8e%9a%e3%81%95%e3%83%87%e3%83%bc%e3%82%bf%e9%85%8d%e5%88%97%e3%81%8b%e3%82%89esfqr-esfqd-esbir-metrics%e6%b3%95%e3%82%92%e4%bd%bf%e3%81%a3%e3%81%a6%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e3%81%ae%e3%82%a8%e3%83%83%e3%82%b8%e8%bf%91%e5%82%8d%e5%bd%a2%e7%8a%b6%e3%82%92%e6%b1%ba%e5%ae%9a%e3%81%99%e3%82%8b%e3%81%9f%e3%82%81%e3%81%ae%e4%bd%9c%e6%a5%ad%e6%96%b9%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}