{"product_id":"m06300-semi-m63-test-method-for-measuring-the-al-fraction-in-algaas-on-gaas-substrates-by-high-resolution-x-ray-diffraction","title":"M06300 - SEMI M63 - Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method describes the use of high resolution X-ray diffraction (HRXRD) as a means of measuring the Al fraction in an AlGaAs epilayer on GaAs substrates, by defining the experimental method and explaining the analysis.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method addresses measurement of the composition of unrelaxed, undoped AlGaAs epilayers on \u0026lt;001\u0026gt;-oriented GaAs substrates.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003ePrinciples are given for a standardized measurement method.\u003cbr\u003e\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThere are differing parameters for analysis already widely in use, either for historical reasons or from local values (e.g., of GaAs lattice parameter) which are appropriate to that user. As such, examples of analysis are given but a single standardized analysis is avoided.\u003cbr\u003e \u003cbr\u003e \u003c\/p\u003e\u003cp\u003eWith the standardized measurement method and a guide for standardized reporting of results, it should be possible to reproduce measurements at different sites, using suitable equipment.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eNone.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI M63-1123 (technical revision)\u003cbr\u003eSEMI M63-0915 (technical revision)\u003cbr\u003eSEMI M63-0306 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M63-1123 - Current","offer_id":43106891628611,"sku":"17267","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M63-0915 - Superseded","offer_id":43106891661379,"sku":"4883","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M63-0306 - Superseded","offer_id":40234301227075,"sku":"9715","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_16a16381-512d-469b-9ab8-5924093dac69.png?v=1776702597","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m06300-semi-m63-test-method-for-measuring-the-al-fraction-in-algaas-on-gaas-substrates-by-high-resolution-x-ray-diffraction","provider":"SEMI Dev 2","version":"1.0","type":"link"}