{"product_id":"m06100-semi-m61-specification-for-silicon-epitaxial-wafers-with-buried-layers","title":"M06100 - SEMI M61 - Specification for Silicon Epitaxial Wafers with Buried Layers","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Specification defines the properties of silicon epitaxial wafers with buried layers that relate to the characteristics of photolithography, buried layer, and buried layer pattern after the deposition of the epitaxial layer.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eThis Specification is intended to be used with the polished wafer specification (SEMI M1) and the epitaxial wafer specification (SEMI M2), which define the properties of the substrate and the epitaxial layer, respectively.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI M1 — Specification for Polished Single Crystal Silicon Wafers\u003cbr\u003eSEMI M2 — Specification for Silicon Epitaxial Wafers for Discrete Device Applications\u003cbr\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI MF26 — Test Method for Determining the Orientation of a Semiconductive Single Crystal\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI M61-0612 (Reapproved 1023)\u003cbr\u003eSEMI M61-0612 (Reapproved 0319)\u003cbr\u003eSEMI M61-0612 (technical revision)\u003cbr\u003eSEMI M61-0307 (technical revision)\u003cbr\u003eSEMI M61-0705 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M61-0612 (Reapproved 1023) - Current","offer_id":43106891792451,"sku":"17213","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M61-0612 (Reapproved 0319) - Superseded","offer_id":43106891825219,"sku":"13538","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M61-0612 - Superseded","offer_id":40234299785283,"sku":"4878","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M61-0307 - Superseded","offer_id":40234299916355,"sku":"9695","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M61-0705 - Superseded","offer_id":40234300047427,"sku":"9699","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_b0f05a3e-d1f9-4d32-bd3f-cd8b8317cc34.png?v=1776702599","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m06100-semi-m61-specification-for-silicon-epitaxial-wafers-with-buried-layers","provider":"SEMI Dev 2","version":"1.0","type":"link"}