{"product_id":"m06000-semi-m60-シリコンウェーハ評価のためのsio2の経時絶縁破壊特性の試験方法","title":"M06000 - SEMI M60 - シリコンウェーハ評価のためのSiO2の経時絶縁破壊特性の試験方法","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，global Silicon Wafer Committee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は\u003cspan style=\"mso-bidi-font-size: 9.0pt\"\u003e2005\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003e年\u003cspan style=\"mso-bidi-font-size: 9.0pt\"\u003e11\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003e月\u003cspan style=\"mso-bidi-font-size: 9.0pt\"\u003e29\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003e日，\u003cspan style=\"mso-bidi-font-size: 9.0pt\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-size: 9.0pt\"\u003eにて発行が承認された。2006\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年2\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月にwww.semi.org\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで，そして2006\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年3\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月にCD-ROM\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。初版は2005\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年1\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行，前版は2005\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年3\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に発行された。\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt 0in\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/p\u003e\n\u003cfont size=\"2\"\u003e \u003ch2 style=\"MARGIN: auto 0in\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eE\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e本スタンダードは\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e2006\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e年\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e5\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e月に編集上の修正がなされた。修正箇所は，¶\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e10.2.7\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eである。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: auto 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: auto 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e本スタンダードは，\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eGOI\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e（\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eGate Oxide Integrity\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e：ゲート酸化膜の完全性）評価をするにあたり，ウェーハ評価の固有事項・問題について記載してある。より一般的な評価法全般については，§\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eの参照スタンダード記載の手法に準ずる。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eM51\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eでの\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eTZDB\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eは，偶発性破壊モード\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e(\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eB\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eモード\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e)\u003cspan lang=\"JA\"\u003eと摩耗破壊モード(\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eC\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eモード\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e)\u003cspan lang=\"JA\"\u003eによる不良率を評価するのに有効である。本評価法は，\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eTZDB\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; FONT-FAMILY: 'MS PMincho'; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003eより高い感度で偶発性破壊モードを検出するのに有効である。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 9pt; mso-fareast-language: JA; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI C3.6 — Standard for Phosphine (PH3) in Cylinders, 99.98% Quality\u003cbr\u003eSEMI C3.54 — Gas Purity Guideline for Silane (SiH4)\u003cbr\u003eSEMI C21 — Specifications and Guideline for Ammonium Hydroxide\u003cbr\u003eSEMI C27 — Specifications and Guidelines for Hydrochloric Acid\u003cbr\u003eSEMI C28 — Specifications and Guidelines for Hydroflouric Acid \u003cbr\u003eSEMI C30 — Specifications and Guidelines for Hydrogen Peroxide\u003cbr\u003eSEMI C35 — Specifications and Guideline for Nitric Acid \u003cbr\u003eSEMI C38 — Guideline for Phosphorus Oxychloride\u003cbr\u003eSEMI C41 — Specifications and Guidelines for 2-Propanol\u003cbr\u003eSEMI C44 — Specifications and Guidelines for Sulfuric Acid\u003cbr\u003eSEMI C54 — Specifications and Guidelines for Oxygen\u003cbr\u003eSEMI C59 — Specifications and Guidelines for Nitrogen\u003cbr\u003eSEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers\u003cbr\u003eSEMI M51 — Test Method For Characterizing Silicon Wafers by Gate Oxide Integrity. \u003cbr\u003eSEMI M59 — Terminology of Silicon Technology (Reapprpved2000)\u003cbr\u003eSEMI MF1771 — Standard Test Method for Evaluating Gate Oxide Integrity by Voltage Ramp Technique \u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI M60-0306E2 - Superseded","offer_id":40234289266755,"sku":"4876","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_a4efd107-65fc-4b74-8d3f-4cc269639ddb.png?v=1776702600","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m06000-semi-m60-%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e8%a9%95%e4%be%a1%e3%81%ae%e3%81%9f%e3%82%81%e3%81%aesio2%e3%81%ae%e7%b5%8c%e6%99%82%e7%b5%b6%e7%b8%81%e7%a0%b4%e5%a3%8a%e7%89%b9%e6%80%a7%e3%81%ae%e8%a9%a6%e9%a8%93%e6%96%b9%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}